SMC Corporation of America
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SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.

switch Reed switch 12 V Relay PLC Yes Grommet 24 V 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12 V 5 V A96V A96 IC circuit Yes Grommet A93V A90V A93 A90 100 V Relay PLC 12 V 24 V 2-wire No 100 V or less IC circuit Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked

A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 12 V 200 V 100 V RZQ IC circuit IC circuit 5 V, 12 V 12 V 100 V or less No Relay, PLC 2-wire 24V Yes No Connector 5 V, 12 V 24 V or less DGrommet Yes Diagnostic indication (2-color indication) Auto switches marked with a "" symbol are produced upon receipt of order.

A I R C U S H I O N .Both Ends N .None H .Cap End R .Rod End *Note: Non Adjustable Cushions are available on units above 4Bore Please Consult P/A Customer Service **Note: Cushions not recommended for Strokes below 3 How To Order MT4 With Non Standard XI Dimension NCA1 T X46US (XI = Total Inches) T Specify XI Dimension in inches Construction Type S T Y L E O P T I O N O V E R S I Z E D R

A DB BN BP BO DC eO eE F GA GB GC GO 10011500 50 136 Bore Size Stroke r.naecmm) (mm) WHhoot boot WHh boot GL GR J K MM 27 30 60 96 V V 44 16 32 10 as 15 26 54 40 500 20500 50 600 20-600 10 10 M8X1 .25 6 M14X1.5 32 35 70 108 V 'I, 52 20 40 10 95 17 27 59 32 35 86 11 5 V V 64 20 40 10 102 17 , 26 67 13 12 M8X1.25 7 M18X1.5 63 600 20-600 18 15 M10X1 .25 7 M18X 1.5 37 40 102 129 V V 78 25 52

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

A I R C U S H I O N .Both Ends N .None H .Cap End R .Rod End *Note: Non Adjustable Cushions are available on units above 4Bore Please Consult SMC Customer Service **Note: Cushions not recommended for Strokes below 3 How To Order MT4 With Non Standard XI Dimension NCA1 T X46US (XI = Total Inches) T Specify XI Dimension in inches Construction Type S T Y L E O P T I O N O V E R S I Z E D R

state switch PLC 5 V, 12 V MDSUA3 S9PV S9P 3-wire (PNP) T99V T99 12 V 2-wire Grommet R73 Reed switch 100 V 2-wire Connector R73C MDSUA7 Relay, S79 3-wire (NPN) IC circuit Heavy-duty cord MDSUA20 24 V 5 V, 12 V PLC Solid state switch Grommet S7P 3-wire (PNP) T79 2-wire 12 V Connector T79C Auto switches marked with are made-to-order specifications.

Mount the filter case securely, otherwise the V port may come off or be damaged. Filter case (2) The V port assembly and removal may not be easy if the product is mounted on the floor. If it is forcibly mounted or removed, the V port assembly may be damaged and/or it may cause vacuum leakage.

. 80 mA Residual voltage 1 V or less T: Analogue output 1 to 5 V Output impedance 1 k V: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -V/-T (Auto-shift input mode) With auto-shift switch output PNP open collector output type 2 output Max. 80 mA Residual voltage 1 V or less -A NPN 2 output type Max. 28

Oil proof heavy duty vinyl cord: 2.7, 0.5m D-F9N(V), D-F9P(V): 0.18mm x 3 cores (Brown, Black, Blue [Red, White, Black]) D-F9B(V): 0.15mm x 2 cores (Brown, Blue [Red, Black]) Note) Refer to page 7 for auto switch common specifications and lead wire length. Internal circuits Weights (g) D-F9N(V) D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

A54 A59W 3-wire (NPN equiv.) 5 V 12 V 5 V, 12 V 100 V Yes IC circuit Relay, PLC No 100 V or less 100 V, 200 V 2-wire 24 V PLC Terminal conduit 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) Solid state auto switches marked with are produced upon receipt of order.

1.2 = 8.4 [kW] V 20C After 15 minutes, cool 32C down to 20C.

switch No Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL 5 V IC IC 3-wire Yes 12 V 5 V, 12 V AC 100 100 V or less Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (

A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 200 V 100 V 12 V IC circuit IC circuit No 5 V, 12 V 12 V 100 V or less Relay PLC 2-wire 24 V Yes No Connector 5 V, 12 V 24 V or less Grommet Yes Diagnostic indication (2-color display) Solid state auto switches marked with a are produced upon receipt of order.

A96V A96 IC circuit 5 V Yes A72 A72H 12 V 200 V 100 V Grommet A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Details 0V 24 V side of the control circuit power supply (24 VDC) which supplies the driver.

3-wire (NPN) 3-wire (PNP) J 5 V, 12 V IC circuit Grommet 2-wire 12 V DConnector 3-wire (NPN) 3-wire (PNP) Relay, PLC 24 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V -X Grommet Water resistant (2-color indication) 12 V 2-wire 20H7BA 4-wire (NPN) With diagnostic output (2-color indication) H7NF IC circuit 5 V, 12 V Data Solid state switches marked with are produced