Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 12 VDC, Wetted Part Material: Plate: PFA; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PFA, 1/4-28UNF, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: -

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28 W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5

Compact Guide Cylinder

PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12

E-P HYREG

k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

IDX-OM-W031

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping. 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation

IDX-OM-W032

Series 6-5 6 4 IDX-OM-W032 7 C 7 C 7-1 7-2 1) 2) IDFA Series 7-1 7 1 IDX-OM-W032 8 K 8 K 8-1 ( ) 8-2 240psi (1.6MPa) AD48-8-A-X2112 10 KQ2L10-02AS IDFA22E,37E-23-K 0.151.6MPa N.O.() 8-1 IDFA Series 8 1 IDX-OM-W032 8 K AD48-8-A-X2112 1 C42FP-260S 1 111692 1 1 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 SMC WEB 8-2 IDFA Series 8 2 IDX-OM-W032 9 L 9 L 9-1

IDX-OM-W053

IDF-S1938 IDF-S0002 1 C42FP-260S 1 10 2 11 K 11 K 11-1 ( ) 11-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDFA6E-20-K N.O. () 0.151.6MPa 11 1 11 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 11 2 12 L 12 L 12-1 1. 1 2 2. 3.

High-Precision Digital Pressure Switch

outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1 T PNP open collector 2 outputs + Analog voltage output*1 V PNP open collector 2 outputs + Analog current output*1 X NPN open collector 2 outputs + Copy function Y PNP open collector 2 outputs + Copy function Symbol Description Nil Unit selection function*1 M SI unit only*2 P Unit selection function

60

: G Conduit: C 23 23 (E) 85 73 D 25.5 D F I 280 F I 300 26 1.6 Width across flats G (E) Width across flats G E 14 E J J 16 22 A A (C) C (C) C 14 2 x H 2 x H Port size Port size 2 x 5.3 2 x 5.3 Mounting hole Mounting hole Width across flats 27 Width across flats 27 14 34 14 34 2 x 5.5 Mounting hole 42 42 B B DIN terminal: D Conduit terminal: T 23 23 (E) G1/2 Cable 6 to 12 K I F I F 34 K D

MY1

piping 2-Rc 1/4 (Hexagon socket head taper plug) VV VV 2-Rc 1/4 (Hexagon socket head taper plug) S 1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147

Compact Vacuum Unit

Output (OUT2) display (Red) LED display button (UP) Brown DC (+) Main circuit Main circuit (Analog output) 1 k 12 VDC Black OUT + to 24 VDC button (DOWN) Load Blue DC () button (SET) Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Vacuum Pressure Switch ZB1-ZSA-A NPN (2 outputs) ZB1-ZSB-A PNP (2 outputs) Lead wire with connector Output (OUT1) display (Green) Connector terminal

CQS

2, !3, !4.

Vacuum Unit Series ZK2

Note 10) Fixed unit: kPa Note 11) When K, Q, R or S is selected, select K for e Combination of Supply Valve and Release Valve.

ITV

Exhaust port 35.7 G G OUT 2 EXH (3) PPA SUP (2) SUP (1) 22 8 AL 36 Flat bracket P3020114 (Optional) 2 x Rc1/4, 3/8, 1/2 Port size 4 x M5 x 0.8 thread depth 6 mm through Mounting hole L-bracket G OUT 2 22 30 R3.5 25 15 25 7 36 L-bracket INI-398-0-6 (Optional) (10) 30 45 2.3 2 x Rc1/4, 3/8, 1/2 SUP port, OUT port (7) 36 14-8-25 26 Series ITV1000/2000/3000 Made to Order Specifications: Please

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"#$ G $ /$+ + $' ))$& ,.0 MVGQM, MVGQL Common Dimensions 11 )7$ +$'& ()($ $ +6$ 11 ")'&)& +#$ 11 B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z 40 2 . . . . 2 .2 . 3 % 3 % 3 % . .. "$$+ ,-... 50 . . 2 . 2 . . . . .. 3. % 3. % 3. % . .. 63 . 2 . 2 . . . . . 2 3. % 3. % 3. % $ 8 + ++7$ 1)'/)$ $ '$1$&)$ +#$+ $ )' $ +)'&)& +#$+ 79 1$)'+ / '+)' ) +)$ $

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g