PSxx-OMU0008CN

8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Soft Start-up Valve AV2000/3000/4000/5000

The pressure difference generated at this time opens check valve and the residual pressure on the A port side is quickly exhausted from R port. 2 1(P) OFF 2(A) 1 3(R) 3 Soft Start-up Valve AV2000/3000/4000/5000 Construction B ON OFF B-B 1(P) 2(A) B 3(R) Parts list No. 1 2 3 Description Material Body Cap Cover ADC ADC ADC Replacement parts Description No. Part no.

3 Port Air Operated Valve

(Values at the initial period) Flow Rate Characteristics/Weight C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Weight (g) Note) Port size Model C [dm 3/(sbar)] b Cv 3.5 4.2 7.9 8.9 11.9 15.1 1/8 1/4 1/4 3/8 3/8 1/2 0.26 0.22 0.21 0.16 0.21 0.21 0.8 1.0 1.8 2.2 2.7 3.6 3.6 4.2 7.2 8.9 11.8 15.3 0.26 0.23 0.27 0.20 0.20 0.22 0.9 1.0 1.8 2.1 2.7 3.7 118 114 237 229 501 484 VPA342 VPA542 VPA742

CE

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

High Vacuum Slit Valve

How to order B B XGT 3 1 2 50336 1 C Auto switch and connector (See below) Material of O-ring of gate 1 : FKM 2 : Kalrez4079 C Kalrez is a registered trademark of DuPont Performance Elastomers.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

VXF21A VXF22A VXF23A VXF24A VXF27B VXF28B VXF25(A,B) VXF26(A,B, C,D) Product number Orifice size mm 22 28 44 53 70 80 90 100 Air Fluid Minimum operating pressure Maximum operating pressure MPa 0.03 0.1 MPa 0.7 Fluid temperature -10 (Non-freezing) to 60 Ambient temperature -10 to 60 Coil insulation type Class B Enclosure IP65 Alloable voltage fiuctuation 10% of rated voltage AC VA 10 7

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Note2) A (set) side energization : A light (orange) illuminates, B-(reset) side energization : B light (green) illuminates.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Fine Lock Cylinder Double Acting, Single Rod 40, 50, 63, 80, 100 Series CLA2 How to Order CLA2 L E 50 100 JN 50 100 E CDLA2 L JN M9BW With auto switch With auto switch (Built-in magnet) Auto switch Mounting Port thread type Made to Order For details, refer to page 2.

CHA

CHA 40 100 L L CHDA 40 100 M9BW Without Auto Switch With Auto Switch With auto switch (built-in magnet) Mounting type Without auto switch Nil Auto switch type Bore size 40 50 63 80 100 Number of auto switches B L F G C D T U Basic type Axial foot type Rod flange type Head flange type Single clevis type Double clevis type Center trunnion type Rod trunnion type 40 mm 50 mm 63 mm 80 mm 100 mm

Air cylinder

Table 1 Tightening torque (Unit: Nm) Foot Flange Clevis Trunnion B CG1*20 1.5 1.5 to 2.2 CG1*25 2.9 2.5 to 3.5 CG1*32 2.9 6.0 to 8.6 CG1*40 4.9 10.8 to 14.6 CG1*50 11.8 19 to 25 CG1*63 24.5 30 to 40 CG1*80 24.5 --CG1*100 42.2 --8)Do not hit or grasp the sliding parts of the cylinder tube and piston rod with other objects.

tTV2000/3000

o 6 o o 0 5 -o l 50 75 100 Input signal %F S 0 2 5 5 0 7 5 Input signal %F S Relief flow characteristics suppty pressure:0 TMPa Flow rate characteristics supply pressure:0 TMPa Pressure characteristics set pressure: 0 2MPa 1 0 a $ o s b g 5 0 0 = ^ g u 5 ) 500 1000 1500 0 2 0 4 0 6 0 Flow rate /min (ANR) Supply pressure l\,4Pa Series |TV303I Hysteresis Repeatability Linearity 0 5 @ I ;9

MRQ

Rotation angle Air cushion A B 80 to 100 170 to 190 With air cushion on the linear motion parts Without air cushion on the linear motion parts C N Applicable Auto Switch (Common for the linear and the rotary motion parts)/Refer to pages 761 to 809 for further information on auto switches.

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

CEP1 CEP1 CE1 CE1 How to Order CE2 B CEP1 12 50 M9BW ML2B Made to Order Refer to page 648 for details. High precision stroke reading cylinder Mounting type B L F Direct mounting rod side tapped type Foot type Rod side flange type Number of auto switches 2 pcs. 1 pc. n pcs.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

200 10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

ITV-E

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8 42.1 56.7 49.2 56.7 49.2 49.6 24 49.6 42.1 24.5 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation.