Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

CG5-S

(mm) Stroke range A Bore size (mm) AL P B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA S ZZ 20 15.5 to 350 1/8 18 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 83 121 25 19.5 to 400 1/8 22 17 50 18.5 10 36 5.5 6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 83 126.5 32 19.5 to 450 1/8 22 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 85 128.5 40 27

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Shock absorber stroke) T Shock absorber MY1W16/20 F MY1W50/63 EC EY (mm) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 EC EY F 4 4 6 6 6 6 6 E EA EB 30 32 38 50 57 66 77 T TT W Shock absorber model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 FC 14 14 13 17 17 26 31 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 FB 54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

7 8.5 13 EC 6 9 13 EY 27 36 57 FA 12.5 19.3 17 h 4 5 6 S 40.8 46.7 67.3 T 6 7 12 TT 5.6 (Max. 11.2) 7.1 (Max. 18.6) 10 (Max. 26) W 16.5 25.8 38 High load shock absorber MY2H Bore size Stroke H G (Shock absorber stroke) S T W SD TT E Shock absorber EA h EY Stroke adjusting unit EC FA MY2H16 W Applicable cylinder MY2H16 MY2H25 MY2H40 TT 5.6 (Max. 12) 7.1 (Max. 18.6) 10 (Max. 6) Shock absorber

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Shock absorber stroke) T Shock absorber MY1W16/20 F MY1W50/63 EC EY (mm) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 EC EY F 4 4 6 6 6 6 6 E EA EB 30 32 38 50 57 66 77 T TT W Shock absorber model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 FC 14 14 13 17 17 26 31 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 FB 54 67 78 FH 13 16 17.5 FW 66 80 91 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50

ISO Standard Hydraulic Cylinder

7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 CHN CHM CHS CHS CH2 CHA !0 q w !2 !

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

KK/KK13

-16E 13 25 16 106.2 125.0 6 S e r Dimensions/Socket (S) Male thread type A2 A1 T D H L L (mm) A2 When connected T Connection male thread Weight g Effective area mm L Min. bore A1 Body size H Width across flats L When connected D Model 19.1 18.9 R 1/8 36 33.5 KK3S-01MS 6 40 18.2 1/8 37.5 14 21.1 18.0 R 1/4 34 31.5 -02MS 9 50.4 22.9 44.7 R 1/8 50.1 46.4 KK4S-01MS 54.1 6 19 51 35.9 41.3 R

HRS100/150

HRS100-A/W-20/40, HRS150-A/W-40 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 123 HRS100/150 Series Specific Product Precautions 5 Be sure to read this before handling

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

AC Servo Motor Driver (Pulse input type/Positioning type)

JXC-OMT0052-B (Simplified Edition) PRODUCT NAME AC Servo Motor Driver (Pulse input type/Positioning type) MODEL / Series / Product Number LECSA Series Contents Contents . 1 Introduction . 6 Terms . 6 1. Configuration . 6 2. Pre-Operation Procedure . 7 2.1 Flow chart . 7 3.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

2/3 Port Valve

(No need to add options "S" and "L".)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

REC

100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Vacuum Pad: Ball Joint Type

Pad diameter (mm) Dimensions by Tubing Diameter R 20.6 R S 12.8 S 10 to 16 10.4 21.6 (mm) Q: 6 Q: 8 Pad diameter (mm) ZPR F-0-B8 (Without buffer/Female thread) 40 50 R 24.3 R S 15.2 S 20 to 32 12.8 26.2 S Hexagon width across flats 12 N 8 ZP3 R F ZP3E Applicable tubing O.D.Q E ZP2 D C ZP2V Y ZP 2.5 ZPT ZPR ZPT ZPR A B XT661 Dimensions A (mm) B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5

Modular Type Filter Regulator Series AW

Metal bowl Metal bowl with level gauge Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Port size Standard specification Accessory specification With pressure gauge Bracket mounting size Panel mount With auto drain Model B 177 242 278 278 Z 6 7 7 7 Y 14 19 21 21 W 28.5

Tie-rod Type Hydraulic Cylinder

4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 35 + 30 (n 2) (n = 2, 3, 4 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 1 pc. 75 80 90 10 75 75 80 80 Different surfaces 35 55 90 90 90 + 30 (n 2) (n = 2, 4, 6, 8 ) Same surface 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6,

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03