AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

Model Selection 1

/N.O./ Double acting 0 to 0.5 Pilot pressure: 0.3 to 0.5 LVA1/2/3/4/5 2, 4, 8, 12, 20 1/8 to 3/4 Single unit Direct operated Threaded type 17-5-17 0 to 0.5 Pilot pressure: 0.3 to 0.5 N.C./N.O./ Double acting 1/4 to 3/4 4, 8, 12, 20 LLA2/3/4/5A Manifold 1/8 to 1/2 LVH2/3/40 N.C. Single unit Direct operated Manually operated 17-5-27 0 to 0.5 4, 8, 12 LLH2/3/4A 1/4 to 1/2 N.C.

CG1-OM0227

D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

(Default settings) Solenoid Specifications Electrical entry DIN terminal (D) DIN terminal (Y) D, Y Coil rated voltage [V] DC 24, 12 AC (50/60 Hz) 100, 110, 200, 220 Allowable voltage fluctuation 10% of rated voltage*2 Power consumption [W] DC Standard 0.35 (With light: 0.45) 100 V 0.78 (With light: 0.87) 110 V [115 V] 0.86 (With light: 0.97) [0.94 (With light: 1.07)] Apparent

Soft Start-up Valve AV2000/3000/4000/5000

AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125

F/ISE

15 7.2 7.5 41.5 22 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Piping port URJ 1/4 Front protection cover The thickness of the panel is to 3.2mm. 12 Series ZSE F/ISE 50 60 50 60 Description (Common to ZSE50F/ISE50 and ZSE60F/ISE60) 31/2 digit LED kPa Displays current pressure Displays current mode

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA

Vacuum Filter AFJ Series

Bowl material Model AFJ20 AFJ30 AFJ40 Polycarbonate C2SJ C3SJ C4SJ Nylon C2SJ-6 C3SJ-6 C4SJ-6 Note) Bowl assembly includes the bowl O-ring. 782 A Vacuum Filter AFJ20 to AFJ40 Series Flow Rate Characteristics (Representative values) Water Drop Removal Type Large Flow Type 5 m 5 m AFJ20-02-5-S/AFJ30-03-5-S/AFJ40-04-5-S AFJ20-02-5-T/AFJ30-03-5-T/AFJ40-04-5-T SP 12 12 ZCUK AFJ20-02-5-T AFJ30-

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

3 Port Solenoid Valve Rubber Seal Series SY100 1

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

DOC1020530

PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.

I

+#ft.F Solenoid Specifications Elaclrical entry Grommet, Grommet terminal, Conduit terminal, olN connector Voftaoes AC -.'.--. 1 1O,22O, 12, 24, 48 696oHz DC _ 24, 6, 12, 48, 10O, 1 10V ly'oltage allowance15+ lO%, of ratsd voltage Ingulation Class B or equivalent Power conaumpdon AC Inruslt-5.6VA(50H2), 5.OVA(6OHZ) AC Holdlng 3.aVA (soHz), 2.3VA (6OHz) Pr6$no Cd{ar tlvFssm DC-1.8w2W(With

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

/N.O. 1 2 3 Station D side U side 4 position dual 3 port valve: N.C./N.O. Manual override Pilot specifications Non-locking push type Nil Internal pilot Nil R External pilot Slotted locking type D Note) 4 position dual 3 port valves are not available with external pilot specification.

NCM-A

32 32 40 Rear pivot mount (C) 40 Double end mount (E) Note) Minimum stroke for mounting auto switches: 0.6 inch for 2 switches, 0.4 inch for one switch. 2 Stainless Steel Body Cylinder Series NCM-A Dimensions ZB + STROKE A K W 0.50 2-ZD NE ZC MM E N KK UNF-2A N B -0.003 0.000 PILOT YC WA WB D ACROSS FLATS Y NN MOUNTING NUT Bore MM KK A B D E K N 075 (3/4") 0.250 1/4-28 0.50 0.624 0.86 0.75

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

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ECC-PNAL-20MT-D ECC-PNAL-20MR-D ECC-PNAL-20MR-A ECC-PNAL-10MT-D ECC-PNAL-10MR-D ECC-PNAL-10MR-A ECC-PNAL-6MR-A Please Note: 1) All PneuAlphas need to be connected to a power supply. 4/2 : 6/4 : 12/8 suitable to their rated voltage specifications. 2) Stand alone controllers can be programmed from the 8 front panel function keys. 3) All Pneu Alpha controllers have a CD-ROM supplied giving