3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2 10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Material Note Body Aluminum die cast q Spool/Sleeve Metal seal Stainless steel w Spool valve Rubber seal Aliminum/NBR Piston Resin e Pilot valve r 2.10-27 VQZ100/200/300 Base Mounted Dimensions: VQZ100 Valve single unit Grommet (G): VQZ115(R)-lGl-01 23.4Mounting holes M5 X 0.8 External pilot port 53 (Only external pilot style (R)) 14.5 14.5 R3.5 3.5 12 X A 2 10 24 1 P 3 R Manual override 34 41

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

Process Pump

AIR EXH Air filter AIR EXH Air filter Strainer Strainer AIR SUP FLUID IN AIR SUP FLUID IN Air supply Air supply Regulator Regulator Process pump PB1011A Process pump PB1013A Transferred liquid Transferred liquid 3 Series PB1000A Process Pump Built-in Solenoid Valve/Air Operated Dimensions Built-in Solenoid Valve PB1011A 11 2 12 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 84 72 60 41

25

3-port solenoid valve Throttle Air filter FLUID OUT AIR SUP Air supply Regulator Strainer AIR EXH FLUID IN Process pump PB1313A Transferred liquid 592 PB1313A Series Process Pump Air Operated Dimensions Air Operated PB1313A AIR SUP Rc, NPT, G 1/8 PA 8 PA(P) 28 43.5 PAX FLUID OUT Rc, NPT, G 1/8 PB PB With LQ3 fitting With LQ1 fitting (6.35) PAF (1.2) PA PB 55 15 FLUID IN FLUID OUT 4.5 30 41

3 Port Solenoid Valve/

A B C D E F G H J K Y300T-A 4.2 82 41 71.5 35 14 7 19 4 41 Y400T-A 5.2 96 48 86.1 40 18 9 26 5 50 Ordering Example Dual residual pressure release valve with soft start-up function VP544-5DZ1-03-X538 1 pc. Filter regulator AW30-03G-A 1 pc. Spacer with bracket Spacer with bracket Y300T-A 3 pcs. Piping adapter E300-03-A 2 pcs. Each product is not assembled.

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: A (AW+AL), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: V (Downstream Valve), Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8R (Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41)

Size: 41 (1/2), Model Combination: B (AF+AR), Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

Size: 41 (1/2), Model Combination: AF+AR+AL, Port Size: 04 (1/2, Size 41), Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: 8 (Metal Bowl w/Sight Glass, Size 31 & 41), Handle Orientation: A (Upward Handle)

AC Servo Motor Driver (SSCNET Type)

(SeeLECSS Operation Manual (Simplified Edition),section 6.3.2 for uploading.) -41- 6.8.2 To Load saved Parameters From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters from. Click Open.

OMR0031

Monitor and Test Mode of the Controller . 41 11. Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.

ZB-OM00301

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

MHK2

20 40 18 16 34 314 MHKL2-20C Dust cover adhesion (Finger part only) 25 63 22 19 41 565 MHKL2-25C Dust cover caulking Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.