VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

V

3 15 50.5 4.5 15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42

Vacuum Equipment

49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

Series SYJA300 3 Port Air Operated Valve

SYJA5l4-01 18 2-2.6 15.5 (Mounting holes for manifold) 24 8.5 A 2.5 15 11 1 13 8.5 SlA M5 X 0.8 34 (External pilot style) (Pilot port) (For solenoid valve) VlA 2-4.5 Manual override (Non-locking) (Pilot port) (Mounting holes) M5 X 0.8 34 2-3.5 Manual override (Mounting holes pitch) (Mounting hole) (Non-locking) 10.6 9 8 A 1 SlA 32 24 15 X 18.6 R P 14.5 3 24.5 30 11.5 37 23 VlA 21 34 4 33 42

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

VCA

G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R 36 44 53 55.5 Q 63 66 69 69 R 35 42

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

%silltr

Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT Fillering Standard Filter Air Ouality ' Filtering levels Pressure Flegulation Standard Begulator Pilot Operated Regulator Filter-Regulator Characteristics Sizing ol Regulators and Filters Compressod Air Lubrication Proportional Lubricators F.R.L Units Siz and lnstallation 38 38 38 40 40 42

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

！ Contact our sales office for delivery dates and prices as this is a special model. SP112X-012E P: PZ P.G.Information (Specialized Product) SMC CORPORATION Power Clamp Cylinder：φ25 4-14-1,SOTO-KANDA, CHIYODA-KU,

[Clamp Cylinder Body Dimensions] Right type Center type Left type 24H7 through 26.5 through CKZ 25 42 * 781EL R Model Arm position Weight kg CKZ25-42A781EL-R Center 0.23Kg CKZ25-42B781EL-R Right 0.23Kg CKZ25-42C781EL-R Left 0.23Kg !

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

17

XX MY1 HT P (Hexagon socket head taper plug) P (Port) MY1 W (Hexagon socket head taper plug) 2 x 2 x J depth K VV ZZ ZZ(MY1BG) (Hexagon socket head taper plug) VV MY1BG MY1BG MY2C Standard piping/Centralized piping (mm) MY2 H/HT A B C G GB H K J LD L LL LW M MM N NC Model E 2 JJ M5 x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Clean Regulator

Dimensions 46.5 Cover 26.5 12 14 Turn counterclockwise until the cover stops. 42 Pull R1/4 2) Use a flat head screwdriver (with a 2.9 mm blade width) to set the limit indicator. Be careful not to bend other needle or damage the dial plate.

Soft Nylon Tubing TS/TISA Series

Note 2) Applicable fittings Note 2) 3) One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings Caution Min. bending radius Min. bending 15 12 23 17 45 34 55 42 65 50 90 70 18 12 27 15 30 23 55 42 65 50 radius mm Note 4) Bending value (Reference) 1. Compatible with water due to a change in materials.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 Double clevis style (D): CJ5DS R V CDH9 + 0.030 0 NB GA 0.030 0.060 Clevis pin ( ) Cdd9 Piping port 2 x M5 x 0.8 GB MM CB CA D 0 0.3 0 0.3 BA BB NA A + 0.2 + 0.1 CX 0 0.3 U BA H S + Stroke Z + Stroke ZZ + Stroke R 0 0.3 BB (mm) CD (Cd) A BA BB CA CB CX D GA GB H

Industrial Filter FGD Series

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

Thermo-chiller

CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

/56 Maximum ow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating ow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating uid outlet, circulating uid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic uid ll system (Standard) Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side

Series PFMC 3-Color Display Digital Flow Switch

Option Note ZS-40-A Lead wire and M8 connector Length: 3 m ZS-42-A Bracket Mounting screw for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket Mounting screw for PFMC7202 (M3 x 5, 2 pcs.) 4