IN20267

Figure 11-1 MPC Group Power Connections The diagram illustrates the Ethernet communication and power cable connections required to support 21 MPCs when daisy chaining is in use. The MPCs in the dashed box form a single Power daisy chain group. Note that power daisy chaining supports a maximum of 20 MPCs in one power group.

Precision Regulator

(Nm) Recommended Proper Torque IR1000 IR2000 IR3000 12.5 21 21 4. If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the precision regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur.

Air Cylinder

48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/

KN Series Nozzles for Blowing

31.4 31 30.5 30.1 27.1 31.8 30.1 41.8 40.1 49.6 47.8 62.8 17.4 17 25.4 25 24.5 24.1 21.1 25.4 23.7 33.6 31.8 40.1 38 52.4 8 8 19 20 21 21 22 36 37 75 76 149 152 328 D H1 A L1 Reference dimensions after R thread installation.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

5 16 1 4 1 4 3 8 17.46 26 17 33.5 22.23 7 17.9 30.5 25.0 3 8 31.5 22 21 33.9 Applicable tubing Reference dimensions after NPT thread installation.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail 12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21

HRL

Temperature stability: 0.1C (CH1) When a load is stable When a load is stable 0.1C By controlling the inverter compressor, inverter fan, and electronic expansion valve simultaneously, it maintains the good temperature stability when the heat load fluctuates. 22 Circulating fluid temperature [C] Circulating fluid temperature [C] CH1 21 20 19 26 kW load 18 0 kW load 17 0 10 20 30 40 When a

Slider Type Ball Screw Drive/11-LEFS Series

AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21

AR20-B to AR60-B

Clean series t Copper, Fluorine and Silicone-free + Low Particle Generation For details, refer to the Clean Series/Low Particle Generation section of the Web Catalog. 21 Standard model no. Copper, fluorine and silicone-free + Low particle generation 80

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Monitor upper limit value 0 to 65535 (Low byte first) 10..11 0..7 (Ch0 in) Monitor lower limit value 0 to 65535 (Low byte first) 12..13 0..7 (Ch0 out) Upper limit value 0 to 65535 (Low byte first) 14..15 0..7 (Ch0 out) Lower limit value 0 to 65535 (Low byte first) 16..17 0..7 (Ch0 out) Fault value 0 to 65535 (Low byte first) 18..19 0..7 (Ch0 out) Idle value 0 to 65535 (Low byte first) 20..21

EXxx-OMW0014CN

EX245-DX1 7.3 EX245-DY1 8.3 EX245-LA1/LB1 9.3 21 No.EX-OMW0014CN-A 4. 4.1. SI SI PROFINET PROFINET IO 4.1.1. GSD PROFINET IO SI GSD (XML GSDML(General Station Description Markup Language))GSD EX245 IO EX245 GSD GSD GSDML-V2.3*-SMC-EX245-SPN-*.xml GSDML-0083-0011-EX245.bmp 4.1.2.

EXxx-OMU0020CN

Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01() 1 Valve 18, 19 diagnostics 01() 2 Valve 20, 21 diagnostics 01() 3 Valve 22, 23 diagnostics 01() 4 Valve 24, 25 diagnostics 01() 5 Valve 26, 27 diagnostics 01() 6 Valve 28, 29 diagnostics 01() 7 Valve 30, 31 diagnostics 01() 36 No.EX-OMU0020CN 5.1.2.

PFxx-OMO0007CN

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

DOC1003626

3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21

HRX-OM-W069

3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register Map . 3-18 HRL Series HRX-OM-W069 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21

A_HEC-OM-J017

20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

HEC-OM-S008

20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

XG_-OMV0028

12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60