SMC Corporation of America
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No.MH*-OMZ0003 / / JMHZ2-16D-X7400B-TM . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. () . 10 3-6. . 11 3-7. . 12 4. . 13 4-1. . 13 4-2. 3 . 14 4-3. . 15 5. . 16 5-1 . 16 5-2. . 16 5-3.

IR-OMT0020 PRODUCT NAME Precision Regulator MODEL / Series / Product Number IR1000-A IR1010-A IR1020-A Contents Safety Instructions 1 to 5 1. Application 6 2. Specifications 6 3. Construction and Operation Principles 7 4. How to order 8 5. Bracket, gauge and switch assembly (optional) 9 6. Panel mounting 10 7. Troubleshooting 11 8.

Specifications 7 1. Application 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8. Dimensions 13 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

How to ground the DC motor (Type3) Shielded part (9) (13) (7) (7) (1) (10) (12) (7) (3) (7) (7) P-clip metal cylinder LC3F2 series (2) 100VAC Eart h Poi nt Sym bol Fram e G round ( FG ) (11) * Machinery layout Cable length or less (6) I N PU T PO W ER SU PPLY (1)(2) Power display lamp not illuminated.

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

IR-OM09 PRODUCT NAME Precision Regulator MODEL / Series / Product Number IR2000-A IR2010-A IR2020-A Contents Safety Instructions 2 to 6 1. Application 7 2. Specifications 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8.

(Table 1) Table 1 Example of applicable fitting: Male connector (O-ring parallel thread) (Made by Swegelok) Cylinder Fitting thread size for Example of Piping tube OD (inch) model piping applicable fitting CYV15 5/16-24 UNF SS-200-1-OR 1/8 CYV32 7/16-20 UNF SS-400-1-OR 1/4 2.

Document No.DOC1018377 PRODUCT NAME Clean Air Filter MODEL / Series / Product Number SFD110- Document No.DOC1018377 Contents Safety Instructions P.2 1. Application P.7 2. Standard specification P.7 3. How to order P.7 4. Construction and Replacement parts P.8 5. Maintenance P.8 6. How to mount P.8 7.

R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8

Product Specifications . 6 3-1. How to order . 6 3-2. Specifications . 6 3-3. Auto switch . 7 3-4. Gripping force . 8 3-5. Gripping point . 9 3-6. Dimensions . 10 3-7. Air Gripper . 11 3-8. Center of gravity . 12 4. Product Specifications . 13 4-1. Attachment . 13 4-3. Mounting to NEXTAGE . 15 4-4. Piping . 16 4-5. Speed controller . 16 4-6.

Product Specifications . 6 3-1. How to order . 6 3-2. Specifications . 6 3-3. Auto switch . 7 3-4. Gripping force . 8 3-5. Gripping point . 9 3-6. Dimensions . 10 3-7. Air Gripper Single Unit .11 3-8. Center of gravity . 12 4. Product Specifications . 13 4-1. Attachment . 13 4-2. Protection cover . 14 4-3. Mounting to duAro flange . 15 4-4.

CYP*-OM0002J 1/11 TITLE P FORMAT No.FOM007-2 2/11 INDEX 1. Handling 3 2. Installation to equipment 3 3. Piping 5 4. Precautions on handling 5 5. Intermediate stop 6 6. Air source 7 7. Operation check and speed adjustment 7 8. Maintenance 9 9. Feature to prevent particle generation 9 10-1. Model Selection 1 10 10-2.

AL4 at 1 sec. and Cooling Output is 100 70%, the output will be 0.7 sec. ON and 0.3 sec.

Red LERR LED is flashing 1 3 4 1 2 Content Err (Default setting) 5 2.5 Mbps 625 kbps Content 5 Mbps CC-Link version Node number 2.00 2.00 2.00 2.00 1.10 1.10 1.10 1.10 64 1 : 8 7 9 6 Number of occupied nodes x10 x1 0 5 4 4 Pin number 1 Address 2 3 5 3 1 4 2 3 2 1 1 4 3 2 1 (2) (3) Content 8 7 9 6 6 Number of occupied nodes SI unit output data size 4 byte (Default setting) 0 5 4 1 2 3 Signal

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)1), and other safety regulations. Safety Instructions 1) ISO 4414: Pneumatic fluid power General rules relating to systems. ISO 4413: Hydraulic fluid power General rules relating to systems. IEC 60204-1: Safety of machinery Electrical equipment of machines.

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread