Clean Room Rodless Cylinder Series CYP ø15, ø32 1

0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port location Nil.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Refrigerated Air Dryer

Combination of S and T (Because S function is also included in T.) Combination of K and V (Only one or the other may be attached.) Note 2) Standard specification is the power cable with plug.

Body Size: 25, Thread: N (NPT), Port Size: 02 (1/4), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: T (T-Interface), Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Thermo-chiller

Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC 3 q Ambient temperature

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: G (for Sizes 20, 25, 30, 40 Round Type Pressure Gauge w/Limit Indicator; for Size10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: T (T-Interface), Semi-Standard 1: 3 (Lubricator w/Drain Cock, Exhaust Port), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Turntable Cylinder Series MGT

groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Elbow type Meter-out AS3201F-02 AS TMH ASD AS AS-FE KE AS-FG AS-FP AS-FM AS-D AS-T AS-D AS-T Meter-in AS3311F-02 Meter-in AS3211F-02 ASP ASN AQ ASV AK VCHC ASS ASR ASQ Component Parts Component Parts No.

IDX-OM-W094

12 T T 12.1 12.2 z z AC240V / DC24V 5A() / 2A() DC20V 3mA IDFA60/70/80/90 Series 12-1 IDX-OM-W094 T 12.3 AC230V z ON z A(4-5) B6-7 z A4-5A B6-7B z 3 5 /() z OFF 3 z OFF 6.2 IDFA60/70/80/90 Series 12-2 IDX-OM-W094 T 12.4 M3.5 1.01.3Nm M4.0 1.42.0Nm 6 5 4 1 2 3 PE N L 7 L,N PE B A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60

IDX-OM-V020

Front Structure of the product number W R 0001 (2018 April) W R 0001 Year Symbol Note Month Symbol Note Serial No. 2018 2019 2020 2021 W Repeated from A to Z in alphabetical order 1 2 3 4 o P Repeated from A to Z in alphabetical order, with o assigned for January and Z for December.

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

LEF-OM006xx

16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0

CQM

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Cylinder with Lock Series CNS

Graph 1 30 20 10 5 4 3 1600st 1400st 1200st 1000st 800st 600st 500st 400st 300st Load movement time: t(S) 2 1 Example) 200st 0.5 0.4 0.3 100st 0.2 280 V' 0.1 100 200 300 400 500 Maximum speed: V(mm/s) V W Step 2 Find the cylinder bore size.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

PF-OMM0004_C

7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -82No.PF-OMM0004-D PF3W704/720/740/711/721() A AA PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W721--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123 78 -83No.PF-OMM0004-D PF3W704/720

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !