125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

15.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT 40/50 F-B 8/01 (Without Buffer/Female Thread) ZPT25F-B8 25 28 M8 x 1.25 8 12 36 ZPT25F-B01 Rc(PT)1/8 6.2 14 ZPT32F-B5 32.5 M5 x 0.8 5 9 ZPT32F-B8 32 35 M8 x 1.25 8 12 13 16 36.5 ZPT32F-B01 Rc(PT)1/8 6.2 14 Width across flats P N NL F D C Y 2.5 A B Dimensions A (mm) B C D F N NL P Y Model ZPT40F-B8 M8 x 1.25 8 12 40 43 12.5 18.5 39 5 ZPT40F-B01 Rc(PT)1/8

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 526 Series AS Speed Controller: Standard Type In-line Type Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.



External pilot port Without M5 x 0.8 thread: Internal pilot VVEXB-1 With M5 x 0.8 thread: Common external pilot VVEXB-2 P = 31 P(1) port: Rc 1/8, For 6 manifold stations or n-Rc 1 8 more, exhaust from the both sides.

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 2 (Energized Closed/N.O.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: S (Surge Suppressor)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: Rc, Voltage: 3 (110VAC 50/60HZ), Lead Wire: G (Grommet)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: F (G), Voltage: 7 (240VAC 50/60HZ), Lead Wire: G (Grommet), Surge Suppressor: S (Surge Suppressor)

Solenoid: No.2 Solenoid, Body Option: 6 (25A), Style: 0 (Energized Open/N.C.), Option: S (Brass or BC6, Copper Body & Shading Coil PTFE (FPM)Seal, Class H Coil), Port Size: 10 [1 (25A)], Thread: F (G), Voltage: 4 (220VAC 50/60HZ), Lead Wire: C (Conduit)

Solenoid: No.2 Solenoid, Body Size: 6 (25A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 10 [1 (25A)], Thread: T (NPTF), Voltage: 1 (100VAC 50/60HZ), Lead Wire: T (Conduit Terminal), Surge Suppressor: S (Surge Suppressor)

03-ckqg_ckqp-e

CKQG-25A CKQG-R200S CKQG-30A 183

SFOD-OMT0012

For clean type (11-) or secondary battery (25A-) type actuator Search without entering 11or 25A-, and select the actuator for which the part number after 11or 25Amatches. e.g.) For 11-LEFSH16A-100BR, enter "LEFS16A-100" and select LEFS16A-100.

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types.  25A-PFMB7201 is a digital flow sensor compatible with air and nitrogen.  Its thermal sensor is protected in a bypass flow path to reduce contact with moisture and contaminants, avoiding accuracy deterioration and damage. 

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types.  25A-PFMB is a digital flow sensor compatible with air and nitrogen.  Its thermal sensor is protected in a bypass flow path to reduce contact with moisture and contaminants, avoiding accuracy deterioration and damage.

The 25A- series variations are compatible with secondary battery manufacturing for electronics, automotive, and other vehicle types.   25A-PFM7 is a digital flow sensor compatible with air, nitrogen, argon and carbon dioxide. The 3-digit LED display can be red or green, changing when a set point is reached.  Either instantaneous or accumulated flow can be shown. 

Rotary table/vane style; Sizes: 1, 3, 7, 20; Single vane & double vane; 90° & 180° available; Auto Switch capable; Series 25A-MSUB is compatible with secondary battery applications

Standard floating type; Mounting: basic; Centering is unnecessary; Rotation angle: ±5°; Series 25A-JA is compatible with secondary battery applications

The 25A-AQ series quick exhaust valve offers high flow capacity in a compact and lightweight in-line body with built-in one-touch fittinigs. Built-in one-touch fittings; Space saving; Light weight; Series 25A-AQ240F, 340F is compatible with secondary battery applications

Base mounted, plug-in type manifold for VQ2*0* valve; D-sub connector (25 pin standard, 15 pin option); Top or side receptacle position; Maximum 24 stations available as standard; 12 port sizes available; Optional DIN rail mount; Series 25A-VV5Q2 is compatible with secondary battery applications