SMC Corporation of America
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E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NcRAl/n".x and Pinion ryp Symbol \ -D \ l ? / L'.. and lo 200" fiom 1 80' model. Lubrication not required; prelubed at lactory OperatirE tempe"ature 15 PSI (1 kgflcrn'?)

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

C C C D D D D Valve seal (maintenance part) 4 Body (material: A6063) C C C C E E E E E E E E (K flange ) F F F Fn n n n (KF flange) F F F Fd d d d Heater (option) Auto switch (option) G G G G H H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196

Ambient and fluid temperature C Not required Lubrication Base mounted Unrestricted 300/50 Mounting orientation Note 2) Impact/Vibration resistance (m/s2) Note 1) In the case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

VPA 0.4 0.3 VPA3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure range MPa Flow Rate Characteristics/Weight Type of actuation Valve model Port size 14/2 (PA/B) Flow rate characteristics Note 2) Effective area mm2 4/25/3 (A/BEA/EB) Note 3) Pilot port size Weight (g) Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Single Double Closed center Exhaust center Pressure center Single Double Closed center

Note 15) Standard lead wire length for pressure sensor is 3 m. Standard lead wire length with connector for switch for vacuum and the lead wire length for switch with energy saving function is 2 m. Note 16) Select C, L, L1, Y when the pressure sensor (P, T) is selected for t Pressure Sensor/Digital Pressure Switch for Vacuum Specifications.

Flow-rate Characteristics/Weight Flow-rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

PCA-1558823 Cable with 7/8 inch connector, Socket, Straight 6 m PCA-1558836 Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849 Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927 Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930 Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943 Cable

PCA-1558823 Cable with 7/8 inch connector, Socket, Straight 6 m PCA-1558836 Cable with 7/8 inch connector, Socket, Right angle 2 m PCA-1558849 Cable with 7/8 inch connector, Socket, Right angle 6 m PCA-1564927 Cable with M12 connector, B code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930 Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943 Cable

Case/Cover material: Aluminum alloy Strainer with other nominal filtration (1,2,5,10,20,40,70,100 m) The filtration other than the standard filtration accuracy, 120 m, is available with the clean gas strainer.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZM With valve 07 5 K E15 LZ 1 S A H L Supply valve, Release valve ZM 07 H 2 E15 L Without valve Vacuum switch electrical entry Nozzle diameter Nil L Grommet type, with 0.6 m lead wire Grommet type, with 3 m lead wire C Connector type, with 0.6 m lead

Note 3) PLC: Programmable Logic Controller Note 1) Lead wire length symbols: 0.5 m M9BW 1 m M Nil M9BWM 3 m L M9BWL 5 m Z M9BWZ Refer to page 889 for the applicable auto switch list.

Ambient and fluid temperature (C) Response time (ms) (1) (at the pressure of 0.5 MPa) 0 (No freezing) to 60 OFF AC 30 or less ON AC 30 or less DC 30 or less DC 40 or less Max. operating frequency (Hz) 3 Lubrication (2) Required (Equivalent to turbine oil Class1 ISO VG32) Manual override Yes (Non-locking) Mounting orientation Unrestricted 150/50 Impact/Vibration resistance (m/s2) (3) Note

Please contact SMC for water resistant products. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM Water resistant (2-color indicator) 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ * Solid state auto switches marked with are produced upon receipt of order. * There are other applicable auto switches than listed above.

Table 5 (mm) Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 Bolt 40 28.5 M 8 Rotating range examples Fig.5 Fig.6 shows piping ports of the rotary actuator. Table 6 shows the port size. Table 6 Size Port size 10 M50.8 15 20 B Port A Port Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 30 40 Fig.6 Port location Rotary actuator ports have a fixed orifice.

PCA-1558823 7/8 6 m PCA-1558836 7/8 2 m PCA-1558849 7/8 6 m PCA-1564927 M12 Bcode2 mSPEEDCON PCA-1564930 M12 Bcode6 mSPEEDCON PCA-1564943 M12 Bcode2 mSPEEDCON PCA-1564969 M12 Bcode6 mSPEEDCON PCA-1401804 M12 Acode1.5 mSPEEDCON PCA-1401805 M12 Acode3 mSPEEDCON PCA-1401806 M12 Acode5 mSPEEDCON EX500-AP010-S M12 Acode1 m EX500-AP050-S M12 Acode5 m EX500-AP010-A M12 Acode1m EX500-AP050-A M12

0.6 m N P A B C D E F NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs Lead wire length 0.3 m L plug connector Without lead wires Without connector AC specifications (50/60 Hz) Lead wire length 0.3 m NPN open collector 1 output + Analog voltage output M plug connector 1 2 3 4 100V 200V 110V[115V] 220V[230V] Without lead wires

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1