ZSM1-115/121

Indicator light IS 3 2 Lead wire R 1/8 Port size ZSM 65 g Weight PF2 IF Electrical Specifications Data ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 30 V, Max. 100 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC Operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Lead

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13 19 1/8 3/16 1/4 3/8 1/2 3/4 Different diameter tubings can be selected within the same body class.

LVQ

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVQ How to Order LVQ 2 0 07 S Option (2) Applicable option Symbol Note 8 v v v 9 v v v 7 v v v 1 v v v v 24 v v v 2 v v v 6 v v v v 3 v v v 4 v v v 5 v v v v Body class Nil J K N Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 For high temperature Pilot port thread type Buffer material FFKM Nil M R N LQ1

18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

Profi-E

Pow er suppl y G N D Bl ue connect or ( Pl ug) 2 N . C. N . C. 3 Com m uni cat i on connect or ( Socket ) ( N ot e 2) RXD /TXD _N A G reen 4 5 N . C. 2 RXD /TXD _PB Red N . C. N ot e 1. W i re col or w hen SM C cabl e i s used. N ot e 2. SM C s PCA1557691 ( cabl e w i t h shi el d) i s recom m ended as t he com m uni cat i on cabl e.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Applicable bore size (mm) Flat type +0.048 0 +0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 9 40 22 32 12 Round type CJ-T016SUS 16 5 5.5 35 20 6.4 2.5 14 48 28 38 16 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 M5 x 0.8 7 12 10 6

Vacuum Regulator Series IRV

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

VXH

assembly Seal 6 Stainless steel, NBR 7 Stainless steel 8 Stainless steel 9 Stainless steel 10 SPC Option 11 Stainless steel 12 AL 13 NBR 14 15 CR 16 DIN terminal Cable 6 to 12 Hexagon width across flats 22 DIN terminal Conduit terminal 2 x Rc , , 4 1 8 3 2 1 (For only VXH2230-04, Rc ) 2 x M5 x 0.8 x 8 2 1 For Rc 1/4, 3/8 334

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Cut the tube perpendicularly to the tube axis to a little longer length than required (use tube cutter TK-1, TK-2 or TK-3). 2. Push the tube until it comes to the end of the barb portion, or it may cause air leakage or release hose. M5 Approx. 1/2 rotation Note) Note) As a guideline, the tightening torque should be 1 to 1.5 Nm. 340

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

18G1/2 1 2:20 dm3/(s bar) (100mm2) 2 3:22 dm3/(s bar) (110mm2)G1/2 0.26G1/2 1 2 5.32 3 5.85.0 MPa0.5 to 5.0 MPa?5 to 80C?

ZSP1

Graph (1) ZSP1-S Graph (2) ZSP1-B 1. Supply the vacuum and electrical power source to the unit. Rotate an adjustment needle clockwise until it stops. 2. With the adsorption nozzle away from a workpiece (open), turn the adjustment needle counterclockwise until the indicator light turns on. 3.

ISA3_L

T Bracket 13

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Dimensions page 13 (Single unit) 5

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

LECPA 2 (Pulse input type) 1 For details about controllers/driver and compatible motors, refer to the compatible controllers/driver below. 2 Only available for the motor type Step motor.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 603 AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

2 !3 !4 !5 !