-6.6 VM 81 88 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported
00015 -0.00047 o'u %.ooto 4.120.73 0.350.02 0.39 0.s4 tvt3 {0.20) 10"32UNF M3x0.5 NCDRBTBWl5 1.340.94 0.98011 -{.01 -0.00017 0.47 0 -{.0017 0.160.730.390.020.5950 1 . 1 4 M3 10.20) 10-32UNFM3X0.5 NCDRBlBW20 1.651.32 1.00 0.79 -0.0015 -0.00045 0 0.0016 0.180.980.390.02 0.79 50 1.42 8-32UNC (0.28) 10-32UNF NCDRBlBW3O 1.97't.791.00 -0.0002 -0.0006 0 -{.0016 0.200,98 0.47 0.04l . r 850 1.69 '
How to Order J S 32 10-125 Stainless steel type Dust cover material Symbol Nil S Material Fluoro rubber Silicon rubber Applicable cylinder bore size (mm) Nominal thread size Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder thread nominal size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-
384 372 494 476 Model L1 L2 L1 L2 VVX31 LQ VVX32 VVX33 LVN Z 59 62 64 W 83 99 106 X 47 48 51 Y 47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91
00015 -0.00047 o'u %.ooto 4.120.73 0.350.02 0.39 0.s4 tvt3 {0.20) 10"32UNF M3x0.5 NCDRBTBWl5 1.340.94 0.98011 -{.01 -0.00017 0.47 0 -{.0017 0.160.730.390.020.5950 1 . 1 4 M3 10.20) 10-32UNFM3X0.5 NCDRBlBW20 1.651.32 1.00 0.79 -0.0015 -0.00045 0 0.0016 0.180.980.390.02 0.79 50 1.42 8-32UNC (0.28) 10-32UNF NCDRBlBW3O 1.97't.791.00 -0.0002 -0.0006 0 -{.0016 0.200,98 0.47 0.04l . r 850 1.69 '
-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.
7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5
6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 36 44.4 57.7 66.4 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 TQ 70 92 109 631 A VNH Series Specific Product Precautions Be sure to read this before handling the products.
0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) When changing parts, follow the instruction manual.
It does not rotate and is limited to only one entry direction. 10.
-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2
10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16
Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Bore size 10, 15 Type M thread Rc 1/8 NPT 1/8 G 1/8 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.
BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661
Air and oil are adjusted with varying quantities by the air for mist from the mixing valve (9) and oil adjustment needles (10) and (11).
Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.
With backflow function ARM2500 0.68 0.96 1.23 1.51 1.78 2.06 2.33 2.61 2.89 ARM3000 1.25 1.75 2.25 2.75 3.26 3.76 4.26 4.76 5.26 754 Manifold Regulator ARM2500/3000 Series Flow Rate Characteristics (Representative Value) Option: Pressure Gauge (Max. pressure indication: 1.0 MPa) Inlet pressure: = 0.7 MPa G33-10-01 GA33-10-01 Outlet pressure (MPa) ARJ AR425 to 935 ARX Width across flats 10
Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/
AF ,AR , , , ,1 ISO VG32. 5 , 5 8 - 3-2. 1 B 1 3 3-3. 3-4. 9 - () 3-5. ,, (-)90 , 5.2 Nm A 10 - 3-6. ,,, RS2H5079Nm RS2H63801214Nm -5 3-7. M4 M41.5Nm -6 11 - 4. A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2.
MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15