Body Size: M5 Standard, Control: Meter-in, Rod and Applicable Tubing O.D.: ø4 - ø4, Lock Nut: Round Lock Nut

Body Size: 10 (M5 Standard), Control: 0 (Meter-out), Rod and Applicable Tubing O.D.: ø4 - ø4, Lock Nut: J (Round Lock Nut)

Body Size: 10 (M5 Standard), Control: 1 (Meter-in), Rod and Applicable Tubing O.D.: ø4 - ø4, Lock Nut: J (Round Lock Nut)

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

C4 C6 M5 L4 L6 B4 B6 4 One-touch fitting 6 One-touch fitting The "" symbol indicates mounting. Put the "" symbol at the beginning of part numbers for solenoid valves, etc., which are to be mounted. M5 x 0.5 4 elbow fitting assembly (upward) Valve stations are numbered from station 1 on the D side.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Rotary Table

Solid sphere Position of rotational axis: Through the center of diameter r 2 2 r I = m5 27 - Kinetic energy Table 9 shows the allowable kinetic energy of the rotary table.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 X 0.45 X 25 l M3 X 0.5 X 30 l M5 X 0.8 X 40 l Pulling force 4.9N 10N 24.5N Stroke (mm) 2 3 3 e Release lock when mounting or adjusting the cylinder. If mounting is done with lock engaged, lock mechanism may be damaged. * Remove bolt under normal operations.

MRQ

(J) I: Moment of inertia...(kgm2) : Angular velocity.(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

REC

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 34.4 1/8" 8.4 38 4.5 16.8 37.6 34.4 8.4 3.2 12.7 12.7 12 10.5 8 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 5/32" 9.3 39.2 5.2 17.4 38.2 35 9.3 4 3.5 3.5 12 8 10.5 AS1001F-05-3 AS1001F-06-3 40.7 6.2 18.5 39.3 36.1 13.5 3/16" 11.4 48.7 16.5 6 11.6 39.3 36.1 6.2 18.5 AS1001F-07-3 AS2001F-04-3 40.7 5.2 20.7 48 42.5 12.7 1/4" 12 40.7 13.7 4 9.3 14

HRX-OM-X084

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

HRX-OM-W002

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

HRX-OM-X071

MT.04 Cumulative use time: It occurs at 5,000 hours. (It can be changed within the range of 1 to 9 hour) Notice of dust-proof filter Maintenance MT.05 Cumulative use time: It occurs at 5,000 hours.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 34.4 1/8" 8.4 38 4.5 16.8 37.6 34.4 8.4 3.2 12.7 12.7 12 10.5 8 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 5/32" 9.3 39.2 5.2 17.4 38.2 35 9.3 4 3.5 3.5 12 8 10.5 AS1001F-05-3 AS1001F-06-3 40.7 6.2 18.5 39.3 36.1 13.5 3/16" 11.4 48.7 16.5 6 11.6 39.3 36.1 6.2 18.5 AS1001F-07-3 AS2001F-04-3 40.7 5.2 20.7 48 42.5 12.7 1/4" 12 40.7 13.7 4 9.3 14