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acid) H2SO4: 96% or less p 50 to 140F (10 to 60C) Ozone p Note 2) 50 to 140F (10 to 60C) Ammonium hydroxide NH3: 5% or less NH3: 5% or less H2O2: 20% or less p Note 1) 2) 50 to 140F (10 to 60C) Ammonia hydrogen peroxide solution p Note 2) 50 to 140F (10 to 60C) Sodium hydroxide NaOH: 50% or less p Note 1) 50 to 140F (10 to 60C) Deionized water How to read the table: p: Useable c: Consult

2 Dimensions p. 2 M Vertical Vacuum Inlet, With Adapter How to Order p. 3 Dimensions p. 3 M Vertical Vacuum Inlet, With Buffer How to Order p. 6 Dimensions p. 6 Construction p. 9 Parts Structure p. 10 Mounting Adapter Part Nos. p. 11 Buffer Assembly Part Nos. p. 12 1 Vacuum Pad 20, 25, 35, 50 Pad diameter How to Order ZP3P 20 PTSF Pad unit Pad diameter Symbol Pad diameter 20 20 25 25 35

(Ensure there is no fiber or dust on it.) 1(P) SUP 13 XL-OMM0005-A Revision history Safety Instructions P P P Po o o o 1st Printing :NQ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009 SMC Corporation

Refer to Chapter 3, Product Specific Precautions 3 (P. 7 to 8) and Chapter 5, Construction and Dimensions (P. 10) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced. 4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table. 5.

determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Allowable driving force table (Fn) (n=1,2,3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (COS + SIN) Inclined (Refer to page 5 for vertical operation.)

(Non-locking) VS 300 4-Rc 1/8 (Lead wire length) (P , R port) VFN (Lead wire length) 2-4.5 (Pitch) (Mounting hole) Manual override (Non-locking) 300 (Pitch) n-Rc 1/8 (Pitch) n-One-touch fitting C4: Applicable tubing T0425 C6: Applicable tubing T0604 (A port) (A port) Refer to the above drawing for DIN terminal dimensions.

Operation of solenoid valves in the outlet side To operate solenoid valves mounted on this products outlet side (A port side), first confirm that the outlet sides pressure (P) has increased to become equal to the inlet sides pressure (P). 6.

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

ISO SIZE 1 ISO 1 2 ISO 2 3 ISO 3 PORT THREAD NIL Rc(PT) NUMBER OF STATIONS T NPTF F G(PF) 2 2 STATIONS : : : : 10 10 STATIONS P, EXH. PORT LOCATION D DOWN STREAM U UP STREAM B BOTH P, EXH.

Depending on the piping volume (piping length and diameter), if the pressure just before the supply (P) port falls below 0.5MPa, the performance such as vacuum pressure may reduce. The pressure just before the supply (P) port is low. Raise the upstream pressure,and the pressure just before the supply (P) port becomes 0.5MPa.

IDG100S-N04-P IDG100-N04-P IDG30L-N03-P IDG50L-N03-P IDG60L-N04-P IDG75L-N04-P IDG60S-N04-P IDG75S-N04-P IDG3-N02-PS IDG5-N02-PS IDG10-N03-P IDG20-N03-P IDG30-N03-P IDG50-N03-P IDG60-N04-P IDG75-N04-P IDG1-N02-P The membrane air dryer uses hollow fibers composed of a macro molecular membrane through which moisture passes easily, but is difficult for air (oxygen and nitrogen) to pass through

nut Carbon steel 14 Air release valve Alloy steel 15 Check ball Bearing steel 16 Wear ring Resin 17 Cushion seal 18 Wiper ring NBR 19 Rod seal NBR 20 Piston seal NBR 21 Needle valve seal NBR 22 Cylinder tube gasket NBR 23 Piston gasket NBR 91 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Dimensions Basic type: CHAB Width across flats G 4-J GA V 2-Rc P

Compact lock unit is light weight and saves space Overall length has been reduced by using an independent brake cylinder (15% compared to P/A products).

A A afll-'h s-zl;lh P R P R (external pilot type) A A , A;Tt-Zb gzt;]ri! , P R P R Model Specifications Air and inert 20-100 PSI (1.5"7kgf/cm,) VAC-1 10Torr 20-1OoPS|(15-7ksflcm'?) N,lax. 120'F (50'C) 20 ms or less (7OPS|) 600 cpm , Slotted Knob locking type Individual, Common Not (Use turbine oil # 1 (lSO VG32) if lubrication is Drovided.)

Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

IODD file 1 1 ISE20B-L(-M)SMC-ISE20B-L-ymmdd-IODD1.1 2 ISE20B-L-PSMC-ISE20B-L-P-ymmdd-IODD1.1 3 ZSE20B-L(-M)SMC-ZSE20B-L-ymmdd-IODD1.1 4 ZSE20B-L-PSMC-ZSE20B-L-P-ymmdd-IODD1.1 5 ZSE20BF-L(-M)SMC-ZSE20BF-L-ymmdd-IODD1.1 6 ZSE20BF-L-PSMC-ZSE20BF-L-P-ymmdd-IODD1.1 1: "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.

Refer to Chapter 3, Product Specific Precautions 3 (P. 7 to 8) and Chapter 5, Construction and Dimensions (P. 10) for maintenance parts. Parts with the indication of "Maintenance part" can be replaced. 4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table. 5.

The combined sonic conductance of the inlet sides (P port sides) piping or equipment should be equal to or larger than the values below.

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.