CEx-OMG0106

Connect head cover tubing wisely with consideration of surrounding conditions. 15 Driving Direction Left Right Brake O per ating P ort Brake Release P ort Head Cover-WL Head Cover-WR Tube Part No. 1 2 3 4 5 6 Head Cover Type Head Cover-WL Head Cover-WR Tubing Side Front Side Bottom Front Side Bottom Driving Left A C E G I K Direction Right B D F H J L Note

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

Free-Mounting Cylinder with Air Cushion Series CU

through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

P/As seal material has undergone a high vacuum degassing process. Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, the conductance C results from V the average velocity of the gas, R the gas constant, M the molecular weight and T the absolute temperature.

Suction cups with flange

Cup Calculation W: Lifting force [N] P: Vacuum pressure [kPa] S: Cup area [cm2] t: Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Theoretical lifting force table The theoretical lifting force (not including the safety factor) can be determined by the cup diameter and vacuum pressure.

NAMUR

The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Series KC Self-seal Fittings

T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT) 1 4 T Connecting thread Part No.

High Power Cylinder:

9 t !8 @2 @4 !

Gun Type Ionizer

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

VCC 0.4 0.3 TQ 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 619 A VNC Series Construction N.C. i i o o t t r w r w Port 12(P1) Port 10(P2) u u In the case of 32A to 50A y y N.C.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

VXA31/32

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

Process Pump

PA PA(P) PAX PPS/PFA dual construction, withstand pressure and heat cycle performance have been improved. No metallic parts are used.

Body Size: IR1000, Type of Setting: 0 [Basic (Handle)], Set Pressure: 0 [0.005~0.2MPa (IR1000/2000) or 0.01~0.2MPa (IR3000)], Thread: NPT, Port Size: 01 [1/8 (IR1000 Only)], Accessory: None, Temperature Environments: High Temp, -5 to 100°C, Max. 80°C w/Pressure Gauge, Suffix: -, Made to Order: -

Body Size: IR1000, Type of Setting: 0 [Basic (Handle)], Set Pressure: 2 [0.005~0.8MPa (IR1000/2000) or 0.01~0.8MPa (IR3000)], Thread: NPT, Port Size: 01 [1/8 (IR1000 Only)], Accessory: None, Temperature Environments: High Temp, -5 to 100°C, Max. 80°C w/Pressure Gauge, Suffix: -, Made to Order: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -