AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

21

Example: Power supply voltage 24 VDC Auto switch internal voltage drop 4 V Example: Load impedance 3 k Auto switch leakage current 1 mA (Solid state) When two auto switches are connected in parallel, malfunction may occur because the load voltage will increase in the OFF state.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

This will prevent the oil filler plug from flying out. 126115AP GA46-10-02 AF11-2 126060 11307 126046 126047 126115AP GA46-10-01 AF11-2 126140 11307 Zinc die-casted, NBR Lubrication plug assembly Pressure gauge (2 pcs.) Bowl assembly Sealing (2 pcs.) O-ring Seal Seal y u i o !0 !1 !2 NBR NBR NBR NBR 126047 (2) !

Power Valve: Economy Valve Series VEX5

Port 3 (R) side Port 1 (P) side Model P1 P2 P3 External pilot External pilot Plug VEX500 Note) External pilot External pilot Pilot exhaust VEX501 External pilot External pilot External pilot VEX510 Note) External pilot External pilot Pilot exhaust VEX511 Note) For pilot exhaust port, silencer AN210-02 is mounted. 2.

Series VS

G M12 CONNECTOR (OPTIONAL) L 1 5 3 M M H SIZE 2 1/2 SIZE 3 3/4 2 PORTS EA, EB PORTS N N ALL DIMENSIONS ARE IN MILLIMETERS R S T EA EB P SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 P PORT Q P O * 3/8 14.5 1/2 16 3/4 18.5 A B C D E F G H I J 29 8.5 ** 22 * 28 48.5 36 32.5 52 32.5 47.5 SIZE 2 SIZE 3 22 27 47 45 40 65 40 71 SIZE 3 SIZE 2 K L M N O P Q R S 41 39 T 57 65 19 17.5 15.5 27 187.5 174.5

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit [Option]

1) B Note 2) K Note 3) N None DIN rail length specified Back pressure check valve Special wiring specifications (Except double wiring) With name plate (Side ported only) Manifold mounting D E DIN rail mounting Direct mounting Note 1) Specify DIN rail length with D at the end.

Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Regulator Symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

ASD

Dual Speed Controller with One-touch Fitting Series ASD How to Order ASD 3 30F 01 06 S K Option Body size Nil K None Hexagonal lock nut M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 2 3 4 5 6 With seal Type 3 Universal Applicable tubing O.D.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

(Fluid can be supplied manually for models without option -K if the side panel is removed.)

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

(Fluid can be supplied manually for models without option K if the side panel is removed.) Note 2) Combination with option B or option B1 is not necessary. The earth leakage breaker with a handle (Option B1) is provided as standard.

S

Series S0700 Slim Compact Plug-in Manifold Bar Base kit (SerialTransmission) EX180 (For Output) SerialTransmission System S How to Order Manifold SS0751 08 C4 C8 Stations Symbol Stations Option 02 2 station Symbol Specifications None Nil D D0 Dl K Note 2) 32 Note) 32 stations With DIN rail (Rail length: Standard) Note) The maximum number of stations will be different depending on the wiring

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000

Note 4) Specify -K for wiring specification for cases below. All single wiring Single and double mixed wiring When there are stations which do not require wiring (e.g. single SUP spacer), specify the wiring specification in the manifold specification so that the number of the solenoids is 16 maximum.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Compact Cylinder with Air Cushion and Lock Series RLQ

Description RLQ40 RLQ50 RLQ63 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C Metal speed controller 5 2 Dimensions not shown are the same as standard type.

Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection Supply Valve and Release Valve: K (N.C.

Supply Valve and Release Valve: K (N.C.

Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: without Option, Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: N (w/o Pressure Switch for Vacuum/Pressure Sensor), Leadwire: without Leadwire, Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection Supply Valve and Release Valve: K (N.C.

Stations: 02 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting