Rotary Table/Vane Style Series MSU

Adjustment: Max. 10.3 6 2 x M5 x 0.8 2 8 A port 1 +0.030 0 B port 3 x 4H9 long groove depth 3 8g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4 x M6 x 1 depth 11 50 0 0.074 53.5h9 48 160 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Industrial Filters

tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133 1620 31 Industrial Filter FGG Series How to Order FGG S B 20 B N 002 A G1 Symbol Option Pressure gauge type G46-10-02M (Brass at wetted

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

CG1

1 !2 !3 !4 !5 !

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

CLK1

Magnetic Field Resistant Reed Switch (D-P7, D-P8) Clamp side lock (B) 3-Rc 1/4 Unclamp side port Rear cushion valve Top width across flats 3 L + Stroke 3-Rc 1/4 GA 4-M6 x 1 Thread depth 12 52 171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

C95

Rod end nut Tie-rod nut Tie-rod Cushion ring B Cushion ring A 1 6-1 1 6-2 4 u i o !

MNB

D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5

MNB

9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !

AC Servo Motor Driver (CC-Link Type)

1)9 RY(n 1)B RX(n 1)A Problem ALM 15 to Reserved RX(n 1)B Remote station communication ready CRD RY(n 1)F RX(n 1)C to Reserved RX(n 1)F Programmable PC or PLC...etc LECSC Driver (RWwn) LECSC Driver Programmable PC or PLC...etc (RWrn) Address No.

Guide Cylinder Series MGG

Auto Switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-A9 D-M9 D-M9W 1 BMA2-020 2 BJ3-1 Note) 1 BMA2-025 2 BJ3-1 Note) 1 BMA2-032 2 BJ3-1 Note) 1 BMA2-040 2 BJ3-1 Note) 1 BMA2-050 2 BJ3-1 Note) 1 BMA2-063 2 BJ3-1 Note) D-C7/C80 D-C73C D-C80C D-H7/H7C D-H7W D-H7BAL D-H7NF BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL

AW

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 one-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 AC Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge P1 P2 A B Note) C D E G J M5 x 0.8 1/8, 1/4 1/4, 3/8 Round type pressure gauge

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1> Unit 0 Unit 1 DY#B SEN3 Digital output SI unit End plate Valve unit 1 byte output 4 bytes output Input data: None Output data: (Unit 0) Digital output unit (EX600-DY#B): 1 byte occupied (Unit 1) SI unit (EX600-SEN3): 4 bytes occupied When Diagnostic mode 0 is selected Input data Output data Byte 0 Byte 0 DY#B (Unit 0) Output 0 to 7 Padding data Byte 1 Byte 1 Output 0 to 7 Byte

Air Combination

Part name Main material AC50(A,B)-D AC20(A,B,C,D)-D AC30(A,B,C,D)-D AC40(A,B,C,D)-D AC40(A,B,C,D)-06-D AC60(A,B)-D (1) Seal HNBR Y220P-050S Y320P-050S Y420P-050S Y520P-050S Y620P-050S Note 1) The number in the table and structural drawing is consistent with the number in [8. How to Replace the Products] (P23) and [9. Disassembly Drawing] (P24).

Compressed Air Preparation Filter

Nil Rc V V V V V N*1 NPT V V V V V F*2 G V V V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V 10 1 V V r Port size + a Mounting Nil Without mounting option V V V V V B*3 With bracket V V V V V + Option t Nil Without auto drain V V V V V b Float type auto drain C*4 N.C.