Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Compatible Fluid: Air / Water / Chemical, Operating Environment: Standard, Type: Electromagnetic Type, Switching Type: Universal, Body Material: Resin, Connection Type: Tube Connection, Plumbing Thread Nominal: -, Tube Diameter: φ2.8, Operating Temperature Range(°C): 0～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1.4, Insulation Class: B, Pipe opening type (details): Body Ported

HRX-OM-X027

HRX-OM-X027 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-6 1.5.1 Safety

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

VZ100/300/500

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

CG5-S

1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

A

4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT Courtesy of Steven Engineering, Inc. !

PFxx-OMY0005

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

Digital Gap Checker ( compatible)

Description 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1(C/Q) -35No.PS-OMW0009-C 3 Installation Connector pin No. (Lead wire side) Connector pin No.

LEC-OM034xx

Q_Address bit 7 6 5 4 3 2 1 0 1 ID5 ID4 ID3 ID2 ID1 2 (6) Return of the final station number Indicates the range of the ID of the controller (LEC) to communication when the initial is processed. ID number is set in binary digit. Input range is from 1 to 5. If the set value is lower than 0 or larger than 5, 5 is set. ID bit 3 2 1 0 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 5 0 1 0 1 45 - 13.

HEC_001W-E

1.1.1 SAFETY TRAINING -1-1 1.1.2 IDENTIFICATION OF DANGER, WARNING, CAUTION AND NOTE -1-1 1.2 WARNING LABEL AND CAUTION LABEL -1-3 1.2.1 THE POSITION OF ATTACHED WARNING LABEL AND CAUTION LABEL -1-3 1.3 PRECAUTIONS FOR RUNNING -1-4 1.3.1 FOR SAFETY -1-4 1.3.2 SAFETY INTERLOCK -1-5 2 CAUTION ON INSTALLATION -2-1 2.1 ENVIRONMENT -2-1 2.2 INSTALLATION -2-2 2.3 MOUNTING -2-3 2.4 PIPING -2-4 2.5

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

ALF400 to 900, ALT-5/-9

( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 ) 9 4 4 ( 8 6 . 7 1 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2

IZx-OMX0087

Procedures to Operation . 2-1. Flow chart to operation . 2-2. Initial setting (IZT43) . 3. Installation and wiring . 3-1. Installation of Ionizer . 3-1-1. Precautions for Installation . 3-1-2. Adjustment of Pressure (Flow adjustment) . 3-1-3. Installation of bracket for nozzle . 3-1-4. Connecting the controller and high voltage power supply module . 3-1-5.