JCRB-OM00003

B 1. Mount the vane shaft (3) into the body B (2). 2. Mount the stopper seals (6) into the stopper (4). 3. Mount the stoppers (4) into the body B (2). (Note) The stopper has the specified position for mounting. 4. Insert the vane shaft (3) into the body A (1). 5. Tighten the body A (1) and body B (2) with the hexagon socket head cap screws (10). (Refer to table 1.) A B 6.

AC Servo Motor Driver (Pulse input type)

1 1 0 Internal speed command 6 (parameter No.PC10) 1 1 1 Internal speed command 7 (parameter No.PC11) Note. 0: off 1: on For LECSB, analog speed command and speed from 7 patters can be set.

S070

3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 ZX Rc 1/8 20 to 50 8 tube Ball joint rotation 15 ZR ZM Buffer Type ZH 10 to 16 20 to 50 ZU Pad dia.

CEx-OMB0060

Wiring 6-1.

Low Profile Air Gripper Series MHF2

1 !2 o !8 !4 @0 @1 r t !5 y !9 e !7 MHF2-8D2 i !6 Component Parts Component Parts Note Material Material No. Description No.

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Air Slide Table Series MXJ

6 !8 q w !0 MXH o MXU MXS u MXQ i MXF !1 MXW @2 @1 @4 @3 !7 MXJ e t !5 @7 @6 @8 @5 With stroke adjuster MXP Axial piping type MXY MTS !2 Without stroke adjuster. With adjuster on extension end y Description No. Material Component Parts With Magnet, Rail Note Description No.

MU

, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

Fieldbus system CC-Link compatible SI unit

the selection of accessories, refer to the catalog. (1)Valve plate EX600-ZMV1 Enclosed parts: Round head screw (M4 x 6), 2 pcs.

0.5

30 2 x 3.5 depth 1 4 x M4 x 0.7 depth 6 Variable angle (Female thread mounting) 90 19.5 1.9 (Power supply switch) 6 (With connector plugged in) 37.5 R41 (84) 25 R76 27 Fan Type Ionizer IZF10/IZF10R Series Dimensions IZF21/31 IZF10/IZF10R Technical Data Power supply cable IZF10-CP L 45 2 36 2 Terminal semi-stripped 3 1 7 1 4.3 4 1 Wiring/IZF10 Pin no.

energy saving effect

When deionized water is used, the electric conductivity should be 1 mS/cm or higher (Electric resistivity: 1 Mcm or lower). 30 min 20 min 14 min 10 min 6 min 4 min Facility Water Supply 2 min 1 min Warning Operating time 30 s 20 s Max. 1. The water-cooled refrigeration type thermo-chiller radiates heat to the facility water.

IDX-OM-O004E

5 . 1 Troubleshooting . 5 1 Chapter 6 References 6 . 1 Specification table . 6 1 6 . 2 Refrigerant with GWP reference . 6 1 6 . 3 Outer dimensions . 6 2 6 . 4 Electric wiring diagram . 6 2 6 . 5 Pneumatic and refrigerant circuits and their functions . 6 3 Chapter 7 Specification for Option A 7 . 1 Safety instructions . 7 1 7 . 2 Specifications . 7 1 7 . 3 Air piping . 7 1 Chapter 8 Specification

2/3 Port Valve for Various

) $ % *%+ * ,* VX021-003BTZ-05 Coil Combination Made to Order Specifications . / / 0 1 " 1 / / 2Splashproof Specifications ( ) ) @" A ) "=A" 1 ( 5 % / / 33 1 '4 % ) 3 ) / & / / 0 5 % / / 5 % * ,* -5 % ) / *% 5 % *%+ * ,* -6 6 7 8 6 6 8 6 6 7 8 6 6 ) 9 9 9: 9; 79 79 79: 79; ! 6 6 6 !"# !9 !9 !9: !9; -/& ,* $ % *%+ * ,* -3$ < ) ( !

MHF2

66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (Mounting hole) 32 36 1.2 1.2 36 Finger opening port M5 x 0.8 2-10 +0.1 0 Close: 0 E-E Open: 401 4-M6 x 1 thread depth 6 8-M4 x 0.7 thread depth 4 68 Attachment mounting thread

MHF2

MHF2-16D2 MHF2-16D1 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !

Compact Cylinder

-3.0 -1 1 3.5 7 10 9 14 W -2.5 -0.5 1.5 4 7.5 10.5 9.5 14.5 Hs 30 32 35 38 44 49 57.5 67.5 A 15.5 16.5 18.5 17 13.5 14.5 20.5 28.5 B 9.5 11.5 13.5 16 19.5 22.5 21.5 26.5 W -0.5 1.5 3.5 6 9.5 12.5 11.5 16.5 The dimension inside ( ) is for D-A96.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"