Type PA3000 115 68 85 105 4-7 7.5 FLUID OUT Rc 3/8 5.5 AIR SUP (P1) Rc 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (P1) Rc 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10
IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF
VXK Grommet DIN terminal VXD Varistor VXZ 1 (+, ) 1 (+, ) Terminal cover VXS VXS SOL. SOL.
NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 5 7 0.25 s/0.5 s/1 s/2 s/5 s 6 7 0.25 s/0.5 s/1 s/2 s/5 s 15 V 1 k 420 mA 600 2 (4 7 2 /6 11 ) 5 / 12 DC24 V10 45 mA () 64 No.LFE*-OMY0008 LFE1 LFE2 LFE3 9 IP65 050 () 3585R.H.() CE RoHS PPSFKM 3/8(10 A) 1/2(15 A) 3/4(20 A) 1(25 A) () 8 340 g 400 g 520 g 680 g 166 [] 20L/min 3(69 []) 4OFF (2 5 ) 5 100 (24 5 100
Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:
3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style auto drain AFD4000
Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = (A-B)/2 n-1 Min.
CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard
14 14 13.6 17 17.0 6 M14 x 1 17 17.6 18.5 21.0 18.5 21.0 M16 x 1 M20 x 1 M16 x 1 M20 x 1 19 24 19 24 8 10 8 10 Applicable tubing 22 25.2 18.5 Mounting plate thickness 7 mm or less 22.0 12 M22 x 1 24 27 18.0 27.0 15-2-114 Piping Module Series KB Air Supply Port 2 Male Connector Socket: KBB H (width across flats) T Weight (g) Model D L1 L2 A Connection thread M5 x 0.8 M6 x 1 Rc Rc KBB1-M5 KBB2
Recommended proper torque Nm (kgfcm) 1/8 1/4 3/8 1/2 Connection thread 7 to 9 (70 to 90) 12 to 14 (120 to 140) 22 to 24 (220 to 240) 28 to 30 (280 to 300) Winding direction Torque Expose approx. 2 threads Pipe tape Operating Environment Warning 1.
11-1-l EX180-ll SJ3000-53-2A 4 5 6 Refer to page 61.
CAT.ES100-49 A Low Differential Pressure Sensor Rated differential pressure range: 0 to 2 kPa 0 to 2 0 to 2 kPa kPa 0 to 2 0 to 2 kPa kPa Accuracy: 1% F.S. 1% % F.S. F.S. 1% % F.S. F.S.
RoHS 50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S. 7 s 2 5F.S. 1090 2 (ZS-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5
Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.
n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Item Note Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.
Nil K Standard type (0.7 MPa) High-pressure type (1 MPa) Thread type Nil F N T Rc G NPT NPTF Semi-standard Rated voltage Port size Nil 01 02 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 1/8 (6A) Without port (For manifold) 1/4 (8A) Light/Surge voltage suppressor Nil With surge voltage suppressor None With surge voltage
7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J (
of hazard label. i 4 i . 2. 6 Caution related to refrigerant. i 4 i . 2. 7 Caution related to handling. i 5 i . 2. 8 Other labels.i 6 i . 3 Waste disposal. i 6 i . 4 Limited warranty and Disclaimer / Compliance Requirements . i 7 Chapter 1 Name and Function of Parts 1 . 1 Name and function of parts .1 1 Chapter 2 Transportation and installation 2 . 1 Transportation.2 1 2 . 2 Installation
to 186 1.0 to 38.0 2 to 76 8 to 186 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Accumulated Setting/display flow range 0 to 9 ft3 x 10-2 0 to 9 ft3 x 10-1 flow Min. setting/display unit 1 ft3 x 10-3 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x
value may change 1 digit. 2 1 1 mmH2O mmHg Series PSE530 pressure sensors are also applicable.