MXF

MXF16 MXF16 10 6.5 M4 x 0.7 2.1 M4 x 0.7 2.1 MXF20 MXF20 12 9.5 M5 x 0.8 4.4 M5 x 0.8 4.4 Caution To prevent the workpiece holding bolts from touching the guide block, use bolts that are 0.5 mm or more shorter than the maximum screw-in depth. If the bolts are too long, they hit the end plate and may cause malfunctions. 8-6-8 9 Low Profile Slide Table Series MXF Construction !6 t !3 !4 !

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40

High Vacuum L Type Valve

Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 Option Port size M5 x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (Lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 4-11-6 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Body ported S070C-G

High Vacuum L Type Valve

Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV

48

1 1 6N q w e r t y !

PSE200

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

3.5 80 ZPT80H-B8 82 16.5 28 M8 x 1.25 4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5

WRF100

Standardized T-type arms and S-type arms Shape selectable to meet specifications/application.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., HIGH PRECISION DIGITAL PRESSURE SWITCH, PRESSURE SWITCH, ISE1-6, N59, 70 lb

Compact Cylinder

D C Example) Bolt M5 x 45L: 4 pcs.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

M5 thread With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings M5 thread 2(B) (A)4 Side ported 5 (R1)5 1 (P) 3(R2) Note) For double solenoid specification, the function symbol below is D.

CXT

PA T (N) d d NN RW RW PW QW PB GP lE W Y Z 2-M5X0.8 2-RB G G HT U (NA) (Option) A L HN(MAX.)

AWG

2 IN OUT IN OUT u r t i u r t i Component Parts Material AWG20K AWG30K AWG40K Note No. Description Body 1 ZDC ADC Platinum silver Bonnet 2 PBT Black Handle 3 POM Black Replacement Parts Part no. AWG20K No.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

AD-CHN-40 M5 Y-shaped double knuckle joint Bracket pin 20: Y-02 25: Y-03 32: Y-04C 40: YHN-04 Material: Carbon steel Material: Rolled steel plate Material: Cast iron RR1 2-D drill through RR1 C1 Chamfer Cf7 NDH10 NDH10 MM C1 Chamfer E1 E1 B NZ NZ NX A NX U1 A1 A1 U1 L1 L1 Part no.

AR20-B to AR60-B

e q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Specifications Model PSE530-M5 PSE531-M5 101 to 101kPa PSE532-M5 PSE533-M5 Rated pressure range 0 to 1MPa 0 to 101kPa 0 to 101kPa Proof pressure 1.5MPa 500kPa Air, Non-corrosive gas Fluid 12 to 24VDC (Ripple 10% or less) Power supply voltage Current consumption 15mA or less Output specification Analog output (1 to 5V, Output impedance: Approx. 1k) Accuracy 2% F.S. or less (within rated pressure