Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 50, Reverse Flow: No, Thread: N (NPT), Port Size: 10 [1 (Size 50, 60)], Accessory, Not Attached: None, Option: Z (Nameplate/Caution Plate for Bowl in Imperial Units )

Body Size: 60, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting)

Body Size: 50, Thread: N (NPT), Port: 10 (1), Option: Standard, Attachment: SV1 (S + V1), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 50, Thread: N (NPT), Port: 10 (1), Option: Standard, Attachment: V (Residual Pressure Relief 3 Port Valve), Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

1

Z NS NZ Nil H None Built-in Only rubber seal type.

2

For model selection of an auto-drain, refer to the Selection Precautions on page 123. 5 10 20 Port size 3 Port size Symbol H Nil Nil Nil Nil H H H 01 02 03 1/8 1/4 3/8 Thread type Symbol Type Nil N F Rc NPT G Components 3 10 20 5 Components Nil H Nil H Nil H Nil H Mist separator Micro mist separator AFM30-A AFD30-A AFM20-A AFD20-A AWD30 AWD20 Micro mist separator regulator Replacement Parts

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Allowable driving force Fn (N) H H MTS 500 H H 300 10 L 200 MY 3.

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RS H A RZQ Weight Mounting Bracket Part No.

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H Model Tubing O.D.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

DO Without connector Do not replace 10-V111 (G, H, L, M) to 10-V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 365 Body Ported 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 Note) [ ]: AC 2 position single Grommet (G), (H): 10-SY3120-H-C6,N7(-F2) G C4,N3 Foot bracket 10-SY3120-H-C6,N7-F1 G C4,N3 9.5 (For mounting bracket) 2-M3 x 0.5 depth 3.5 38 31 4 13.1

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Fluid Name and Option Fluid Name and Option Option symbol and body material Brass or BC6 Stainless steel J A H A H A H D N G, J E P A H A H B J E N, P Option symbol and body material Brass or BC6 Stainless steel F, B L, J B J J A H A H A H D N G, J E P A H A H A H B J D, E N, P Fluid (Application) Fluid (Application) Caustic soda (25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side

MY1

H.

ZP

M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 40 43 6.5 15 4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A

&snac

H a r m f u l s u b s t a n c e s D G 3 H D G 3 H M D G 3 H V D G 5 H D G 5 H M D G 5 H V I i M E M B R A MEMBRANE A I R D R Y E R R DRYER UN I T N E A I B e f 0 r e . 0 p e r a t i n g , y 0 u s h 0 u l d f i r s t t h o r o u g h l y r e a d t h i s m a n u a l . K e e p t h i s i n s t r u c t i o n r n a n u a i .

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M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Applicable tube O.D.

ZP

29.5 40.3 58.1 4.5 2.3 Deep Deep Model A B C D E F Y G G H: M6 x 1 H: M8 x 1.25 H: M5 x 0.8 H: M6 x 1 H: M8 x 1.25 Model A B C D E F Y G G G ZPR40D 40 43 29 42.5 53.3 71.1 6 8 17 ZPR25D 25 28 20 35 45.8 63.6 5 6 8 10 Applicable Tubing Applicable Tubing Applicable tubing O.D.

Hydraulic

B (mm) C d D H B Part no.

Air Cylinder

-R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N

ZP

M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Applicable tube O.D.