PWR P P 1 1 A A End plate SI unit Valve manifold Switch setting Before setting of Node-ID by DIP switch, turn OFF power supply to the SI unit. Safety Instructions Exchange of SI unit Remove screws from End Plate and release connection of each unit. Replace old SI unit with new one. (Tie-rod does not need to be removed.)
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2 (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: None), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: None, Calibration
M AX.SUP.PRESS. 1.0 M Pa OUTPUT PRESS. 0.0050.2 M Pa M ADE I N J APAN G So No. o S o1 T P2 U Q3 V R4 W Z12 -6- 5 (1) 1/4 1214 (2) (3) (4) -7-7- (1) (2) (3) (4) 1 2 3 (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 -8- (1) (2) (3) 21Nm (4) (ONOFF (5) 79Nm (6) (7) (1) (AF ) AMAFM (2) 1( 2 1.5 (1) -9- 6. (1) 1 1.5 (2) , (3) a. b. c.
) 3F.S.(25 050) M50.8 050() 3585%RH 100G X, Y, Z3 IP40(IEC) 40(W)20(D)110(H)(mm) 100g(50g50g) CE(15F.S.)
Supply(P),Vacuum(V), One-touch Fitting: N (Supply (P) Port: ø1/4"; Vacuum (V) Port: ø1/2"), Exhaust Type: Silencer Exhaust, Supply/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet, Lead Wire Length 300mm), Light/Surge Voltage Suppressor: S (w/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted
Sensor Range: 0 [Positive pressure (0 to 1 MPa)], Accuracy: ±2% F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Output Specification: P (PNP open collector 1 output), Lead Wire Termination: S (With M12-4 pin connector, 500 mm), Set Value: P (Normal Output), OUT1 Set Value: 007 (0.7 MPa, −70 kPa, 70 kPa), OUT1 Hysteresis: 2 (0.02 MPa, 2 kPa, 2 kPa)
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 14 (Longer than Standard
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate w/o Station Number), DIN Rail Option: 14 (Longer
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 6 Stations, P,E Port Location: B (Both Sides), A,B Port Size: N7 (ø1/4" One-touch Fitting, Fixed), Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: S (All Single Wiring), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), A,B Port Size: M5, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting: D (DIN Rail Mounting w/DIN Rail)
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: S (All Single Wiring), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), A,B Port Size: M5, Thread: Rc (or No Selection in the Case of M5 or One-touch Fittings), Mounting: D (DIN Rail Mounting w/DIN Rail)