7

1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Basic type / Direct mount type Series CY3B/CY3R

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB T 4 x counter bore dia.

CRBU

T Connection port location Y P 10 90 S E C1C30 Without auto switch W CRBU2 With auto switch With angle adjuster CDRBU2 10 90 S T79L C1C30 W U P Made-to-order symbol Vane type With auto switch Rotating angle Auto switch Size Free mount type Shaft type Patterned sequence ordering W Standard Refer to page 11-3-4.

Series 10-SV ® EX500 Decentralized Serial Wiring

Tie-rod base SS5V 10 1 A2W W D 05 U 10S Cassette base SS5V 10 W U D 05 16S 1 A2W Clean series DIN rail length specified Enclosure IP67 Standard length Nil 3 Series For 3 stations Specify a longer rail than the standard length. 1 2 10-SV1000 10-SV2000 16 For 16 stations SI unit 0 Without SI unit DeviceNet/PROFIBUS DP/ EtherNet/IP A2W Valve stations P, E port location Symbol 02 Stations

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

For 3 stations 0 Without SI unit 16 DeviceNet/PROFIBUS DP/ CC-Link/EtherNet/IP For 16 stations A2W Valve stations P, E port location Stations 2 stations Note Symbol 02 U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) (1) Double wiring specifications 08 02 8 stations 2 stations (2) Specified layout (up to 16 solenoids possible.)

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22 Add to Quote Add To Cart Add to Cart, 1.3376 lb

5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22 Add to Quote Add To Cart Add to Cart, 0.62744 lb

5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22 Add to Quote Add To Cart Add to Cart, 1.54323 lb

5-02 individual sup spacer, vqz3000, VQZ3000 VALVE, SOL 4/5-PORT*** $13.22 Add to Quote Add To Cart Add to Cart, 2.04714 lb

MY1

Horizontal mounting y P. 8-11-6 x y W: Workpiece (2 kg) x z 3. Ceiling mounting 4.

D. P. Lube ALD600/900 Series

P.

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W D 1.6 x P 0.1 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-64.)

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Compact Rotary Actuator Series CRQ2

2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

Rotary Actuator

Static load (Ts) When the resistance load is rotated, the Inertial load: Ta Ta = )W required torque calculated from the inertial load must be added. 2Q W = [rad/s2] Required torque T = Tf x (3 to 5) + Ta x 10 t2 Required torque: T = Ts Required torque: T T = Ta x 10 Resistance load (Tf) 2 x P Required torque: T = Tf x (3 to 5) = 0.000315 x x 10 = 0.055 [Nm] 0.62 Inertial load (Ta) 0.055

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Mechanically Jointed Rodless Cylinder Series MY1

Slide bearing type MY1M(W) Mechanically jointed rodless cylinder MY1 From P. 956 2 With cover (W) is also available.

Air Cylinder Series MB

5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !