Nozzle Size: 2 (ø1.0), 1st Selection Supply Valve and Release Valve: K (N.C.

Stations: 02 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: K (Vacuum Break

Pump System), 1st Selection Supply Valve and Release Valve: K (N.C.

ATX-OM-F003E

If water is used as the facility water, please refer to JRA-GL-02-1994 [water quality guidelines for refrigeration and air-conditioning equipment] prepared by Japan Refrigeration and Air Conditioning Industry Association as a reference for the water quality level to prevent excessive corrosion and scale-related problems. The values are shown in Table 2.

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Voltage output 1 to 5 V Linearity: 5% F.S. or less; allowable load resistance: 100 k or more.

Compact Cylinder with Air Cushion and Lock Series RLQ

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

Rotary Cylinder Series MRQ

(Position lock) Nabeya Bi-tech Kaisha (Clamp lock) Adjusting angle per 1 rotation of angle adjusting screw 5.7 4.8 MA12 x 26 PSL-K-12 CLH-12 x 18 MA14 x 28 PSL-K-14 CLH-14 x 23 Please consult with manufacturers concerning further information on specifications. Precautions Backlash The rotary motion part has a structure that does not generate backlash.

D. P. Lube (Unit) Series ALD(U)600/900

This will prevent the oil filler plug from flying out. 126115AP GA46-10-02 AF11-2 126060 11307 126046 126047 126115AP GA46-10-01 AF11-2 126140 11307 Zinc die-casted, NBR Lubrication plug assembly Pressure gauge (2 pcs.) Bowl assembly Sealing (2 pcs.) O-ring Seal Seal y u i o !0 !1 !2 NBR NBR NBR NBR 126047 (2) !

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

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r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"OK-I--~;..;~ -1 I I WNI. : ~ I) ~AX . 8tImA +12-24'/OC + '3 I 'liMe iAoa'Cg oUlpUl) + 1 2-2~VCC 12-24VOC ~ F='-'-F===""--, I I LE OIAUI I BIeC!

AMD

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Optional specification C C D J R D J T AMD150 R AMD250 AMD350 AMD450 Applicable model Accessory (Option) Port size AMD550 AMD650 AMD850 01 B 06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMG850 1 2 13 42 348 220 57.5 220 10 14-20-7

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

RLQ

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No. YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Pressure Range: ISE70G (0 to 1 MPa), Piping: 02 (Rc 1/4), Orifice: None, Unit Specification: M (SI Unit Only)

Pressure Range: ISE77G (0 to 10 MPa), Piping: 02 (Rc 1/4), Orifice: None, Unit Specification: M (SI Unit Only), Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)