Manifold Type: Base Mounted, Valve Stations: 6 Stations, A, B Port: ø6 One-touch Fitting G, CE Marked: CE Marked

Manifold Type: Base Mounted, Valve Stations: 6 Stations, A, B Port: ø6 One-touch Fitting, CE Marked: CE Marked

Manifold Type: 41 (Base Mounted), Valve Stations: 6 Stations, A, B Port: C4F (ø4 One-touch Fitting G), CE Marked: Q (CE Marked)

Manifold Type: 41 (Base Mounted), Valve Stations: 6 Stations, A, B Port: C6F (ø6 One-touch Fitting G), CE Marked: Q (CE Marked)

Manifold Type: 41 (Base Mounted), Valve Stations: 6 Stations, A, B Port: C6 (ø6 One-touch Fitting), CE Marked: Q (CE Marked)

Manifold Type: 41 (Base Mounted), Valve Stations: 6 Stations, A, B Port: C4 (ø4 One-touch Fitting), CE Marked: Q (CE Marked)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

SMC

G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41

CL

41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

MG

Description Refer to How to Order for the standard model numbers on page 8-19-41. Part no. Applicable stroke (mm) 5 to 395 Part no.: MGPM50-35-HN A spacer 15 mm in width is installed in a MGPM50-50-HN. C dimension is 119 mm. Example Note 1) The minimum stroke for mounting auto switches is 10 stroke or more for two switches, and 5 stroke or more for one switch.

SFOD-OMT0005CN

(P.41) (CN1: EMG OFF 3.(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Series IDG

Page 41 Precautions .

Stopper Cylinder

[mm] Bore size A B E J K M N O T Z 40 152.5 52.5 52 5 41 40 5.5 9 depth 7 44 15 50 154 54 64 7 50 50 6.6 11 depth 8 56 19 D* Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified.

CRB2/CRBU2/CRB1

Volume Double vane Single vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model Rotation 90 180 270 90 180 270 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 90 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 Volume

IDG

For flow characteristics, refer to pages 14-19-37 to 14-19-38 for external dimensions, refer to pages 14-19-41, 43, 45, and 47. 14-19-35 32 Series IDG Standard Specifications/Unit (Type M, Type V) [Standard dew point: 60C] Model Standard dew point: 60C IDG75SM IDG100SM IDG60SM IDG60SV IDG75SV IDG100SV AFM40 AFD40 AR40 Micro mist separator Mist separator Component equipment Regulator (Type

High Power Cylinder:

D d H Part no B C 30 M22 X 1.5 26 8 26 SOR-20 20 15.0 12.5 M8 X 1.25 5 13 NT-02 20 36.9 M24 X 1.5 32 8 32 SOR-25 25 19.6 16.5 M10 X 1.25 6 17 NT-03 25/32 43.9 M30 X 1.5 38 9 38 SOR-32 32 25.4 21.0 M14 X 1.5 8 22 NT-04 40 47.3 M33 X 2.0 41 11 41 SOR-40 40 4.10-6 High Power Cylinder Series RHC How to Rotate the Relief Valve Body The relief adjustment screw can be placed in any direction by

RSQ

A 152.5 154 B 52.5 54 E 52 64 I 69 86 J 5 7 M 40 50 N 5.5 6.6 O counterbore 9 depth 7 11 depth 8 T 44 56 Z 14 19 W 66 80 U 35 41 Bore size (mm) 40 50 Data Note 1) Dimensions without auto switch are the same as drawing above. Note 2) These figures show the dimensions when equipped with D-A73 or D-A80 auto switches.