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(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

10-SYJ3000

: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

Exhaust Cleaner for Clean Rooms AMP Series

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

VZM400

Main valve/Rc (6A) Lubrication VA 1 8 Port size Pilot valve (EXH)/M5 x 0.8 Option Foot bracket (2) VM Weight (Basic) 150 g Please contact SMC for manifold mounting style. Note 1) External pilot type Main valve: 0 to 1.0 MPa Pilot valve: 0.15 to 1.0 MPa Note 2) The standard body can not be retrofitted with a foot bracket. VR VH VHS Model Actuator part no.

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

WA WB NN MM GB GC GA Relief port M5 x 0.8 Rod end nut Mounting nut NN WW Piping port 2 x M5 x 0.8 Cover surface C D B 0 0.3 FY FB F FT B 0 0.3 FZ FX Z + Stroke S + Stroke NB H NA A 2 x FC Mounting hole (mm) GC 5 5 22.9 22.9 10 16 109.5 110.5 73.5 74.5 45 45 13.4 13.4 20 20 29.5 29.5 M4 x 0.7 M5 x 0.8 28 28 6.5 6.5 8 8 4 5 17 20 15 18.3 15 15 FC 5.5 5.5 17.5 19 FB 11 11 FT 2.3 2.3 FX 33 33

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

10112122Rubber bumper GB GC GA NN MM Mounting nut Relief port M5 x 0.8 Rod end nut NN Cover surface Piping port 2 x M5 x 0.8 C D B 0 0.3 FY FB B 0 0.3 FZ FX 2 x FC Mounting hole Z + Stroke S + Stroke NB H NA F A FT F (mm) FZ 42 42 FY 20 20 FX 33 33 FT 2.3 2.3 FC 5.5 5.5 17.5 19 FB 11 11 GC 17 20 C 15 18.3 B 90 91 Z 54 55 S 9.5 9.5 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 NN M4 x 0.7 M5 x 0.8

SMC Pneumatic Clean Series

8 0 -0.3 LX X T A Y NA NB LZ S + Stroke H Head cover side Rod cover side Z + Stroke 10 and 16 Cover surface MM NN GA GB F GC Piping port 3-M5 x 0.8 Piping port M5 x 0.8 CA CB D LY LB LH LT BA 0 -0.3 BB 0 -0.3 LX Head cover port location Axial direction (R) X A Y NA NB 2-LC Mounting hole LZ S + Stroke H Head cover side Rod cover side Z + Stroke (mm) 5 5 12 GA GB 11 11 11 H Bore size Z LZ

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

Pressure Gauge Guide

AL 43.5(45.5) 43.5(45.5) 5 GA46 M5 x 0.8 x 5 M5 x 0.8 x 5 M48 x 2 M48 x 2 For setting method, Refer to page 14-11-15 . 14-11-7 7 Pressure Gauge Guide Pressure Gauge for General Purpose O.D.: 30 G33, GA33 Standard Specifications G33 GA33 Back side thread Vertical side thread R Air 3% F.S.

VQC

With 4 (5/32") One-touch fitting C4 (N3) Cylinder port sizes Note 3) Side port C6 (N7) With 6 (1/4") One-touch fitting Side port Side port M5 M5 thread Dual flow fitting VVQ1000-52A-C8 Single wiring Special wiring Note 4) specifications Double wiring Description/Model Stations 2 1 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Note 1) Indicate the shutoff position.

VS 8-2/VS 8-4

SV MODEL (SI No.EX126D-SMJ1) 15 4 x M5 mounting holes SI unit Formula: L1 = 19n + 71, L2 = 19n + 175.5 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 346.5 90 194.5 1 128 232.5 223 327.5 8 204 308.5 10 261 365.5 11 280 384.5 12 299 403.5 13 318 422.5 14 337 441.5 15 356 460.5 16 375 479.5 185 289.5 166 270.5 147 251.5 109 213.5 L1 L2 12 kit (D-sub connector) F Series

5 Port Solenoid Valve, Series VQC

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5 64 87.5 98 75 100 110.5 86 112.5 123 97 125 135.5 108 125 135.5 119 137.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table Series MXP Dimensions MXP16/With Shock Absorber 2-M5 x 0.8 depth 8 Z 3 V K 6.5 Max. 15 11 M Stroke: S MXP16-20B Width across flats 12 A M8 x 1 H 24.3 17.1 14.4 40.8 MA 10.5 11 11 8.5 27.3 34 Operating port 2-M5 x 0.8 (Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5

e

L-bracket / MYE-LB (Option) 87.3 22.5 Hexagon socket head cap screw (accessory) 2 25 60 (67) M5 x 8 2 pcs. 60 58 28 7 2 x 5.5 Round head combination screw (accessory) DIN rail bracket / MYE-DB (Option) M4 x 10 1 pc. 87.3 4.3 11 35.5 22 (7.5) (11.8) 73.6 (74.5) Round head Phillips screw (accessory) 21 M3 x 6.5 2 pcs. 42 1130 e-Rodless Actuator Linear Guide Type / Nominal Size: 16, 25 Series