VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

Manifold Specifications

12 00F 12 stations 00N NPTF 00T 1(P) port Rc 1/4 3/5(R) port Rc 1/4 For How to order applicable connector assemblies, refer to page 3-3-7.

IDX-OM-Z004

3.7 . 3-4 4 4.1 . 4-1 4.2 . 4-1 4.2.1 . 4-1 4.2.2 . 4-4 4.2.3 V) . 4-7 4.2.4 . 4-7 5 5.1 . 5-1 5.2 . 5-3 5.3 ( (R)) . 5-4 6 6.1 . 6-1 6.2 GWP . 6-2 6.3 .6-3 6.4 .6-6 6.5 . 6-7 6.6 . 6-8 7 7.1 . 7-1 2 IDX-OM-Z004 i i i.1 () 5.2 OFF i.1.1 3 IDF100150F-W i.1 i-1 IDX-OM-Z004 i i.2 IDF100150F-W i.2 i-2 IDX-OM-Z004 i i.2.1 i.2.2 i.2.3 50 i.2.4 IDF100150F-W i

Sine Cylinder Series REC

7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

ZX

20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

Free Mount Cylinder for Vacuum Series ZCUK

GC + Stroke Vacuum port size d Through Width across flats L 2 x P through 4 x T counterbore SA + Stroke S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5 Note 1) ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 M5 x 0.8 5 7 20 32 2 6 7 8 13 17 28 31 1/8 1/8 1/8 1/8 6.6 5 to 50 8 9 10.5 26 32

CLK1

Caution 1. Drain flushing. Remove condensate from air filters regularly. (Refer to specifications.) This will cause damage to the seals. 25 Series CLK1 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 7. Do not use a load that generates surge voltage. 1. Confirm the specifications.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

7 !9 !8 @4 #3 #0 #4 $0 #9 @5 #2 w @6 @3 u e !6 !5 !1 !2 !0 #7 @1 #5 @2 @8 @7 #6 @0 #8 !3 !

IDX-OM-W095

5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFC60/70/80/90 Series IDX-OM-W095 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 C . 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5

70pvpump

Panel mounting possible Selectable pressure unit Panel mounting possible Selectable pressure unit Auto shift function Compound pressure Selectable pressure unit R thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-41

Compact Cylinder with Air Cushion Series RQ

34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 30 to 100 mm Bore size (mm) OB P Q RB W Z 32 40 50 9 23 7 49.5 14 1/8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.

10

-16DmZ M5 x 0.8 4.3 10 MHL2-20DmZ M6 x 1 7.3 12 MHL2-25DmZ M8 x 1.25 17.7 16 MHL2-10DmZ M4 x 0.7 1.4 5 MHL2-16DmZ M5 x 0.8 2.8 7 MHL2-20DmZ M6 x 1 4.8 7 MHL2-25DmZ M8 x 1.25 12.0 7 How to Mount the Attachment to the Finger 1.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5

Industrial Filters

(with cover anti-scattering mechanism) 32 B Industrial Filter FGG Series Specifications FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Model Port size (Rc) 2 Max. operating pressure (MPa) 0.7 FGD Operating temperature (C) 0 to 80 (60 with pressure gauge) Number of elements 21 7 Note 2) 28 7 Note 2) 14 7 Note 2) 21 7 Note 2) 28 7 Note 2) 14 7 Note 2) FGE

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

LECA6_C

A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

KP/KPQ/KPG

-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 D1 4 4 4 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12