MHY2/MHW2

6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Model Selection 1

P. 17-5-101 6 VN 1 2 LVC 3 LVA Male 4 LVH 5 Elbow LQ1L P. 17-5-102 6 LVD 1 LVQ 2 LQ 3 Female 4 LVN 5 TI/ TIL P. 17-5-103 6 PA 1 2 PAX 3 PB Male 4 5 Run tee LQ1R P. 17-5-104 6 1 2 3 Female 4 5 P. 17-5-105 6 Note) Basic size With reducer 17-5-93 22 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

MHF2

2.3 4 2-3H9 +0.025 0 depth 3 6 16 16 7.5 7.5 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 56 18 Series MHF2 Dimensions MHF2-20D1 Scale: 50% 66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

PF2A/PF2W

ZSM PF2 Terminal block number 5 6 7 8 IF 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

CJ5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38

CJ5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 Rc(PT)1/8 Rc(PT)1/4 One-touch fitting for 6 One-touch fitting for 8 01 02 C6 C8 D N Drop prevention Stop in the middle Note)When specifying more than one symbol, indicate them alphabetically.

CJP

Part no. m t Snap ring D d9 3 d l D d9 3 L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1

CJP

Part no. m t Snap ring D d9 3 D d9 3 d l L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1

Bernoulli Gripper

0.5 [MPa] 12 10 0.5 [MPa] 5 0.5 [MPa] 0.4 [MPa] 10 0.4 [MPa] 8 Lifting force [N] Lifting force [N] 0.4 [MPa] Lifting force [N] 4 0.3 [MPa] 8 0.3 [MPa] 0.3 [MPa] 6 0.2 [MPa] 3 6 0.2 [MPa] 0.2 [MPa] 0.1 [MPa] 4 0.1 [MPa] 2 4 0.1 [MPa] 2 1 2 0 0 0 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 3 2.5 2 1.5 1 0.5 Distance from the workpiece [mm] 0 1 1.5 0.5 2 2.5 3 Distance from the workpiece

Pilot Operated

/N.O. 1/8 to 1/2 N.C.

Digital Gap Checker

Order 6 One-touch fitting *2 Control unit Stations F G1/8 *3 Control unit (Supply port: Left side) 1 1 station 2 2 stations 3 3 stations 4 4 stations 5 5 stations 6 6 stations G1/8 *3 *1: When F is selected for the rated distance range. *2: When G or H is selected for the rated distance range. *3: Conforming to ISO1179-1 L Option 1 (Cable) Straight *5 *6 Centralized lead wire (Lead wire

Air Filter

Note 1) The numbers in the table and structural drawing are consistent with the numbers in [10. How to Replace the Components] (P23-28) and [11. Disassembly Drawing] (P29). -10- 6 Bowl Assembly Specifications 6-1.

Series KG Stainless Steel One-touch Fittings

(mm) M5 Weight (g) D A Nylon Urethane M5 0.8 KGS04-M5 KGS04-01 KGS06-M5 KGS06-01 KGS06-02 KGS08-01 KGS08-02 KGS08-03 KGS10-01 KGS10-02 2.7 2.6 8 3.6 2.7 2.7 4.1 2.7 15.5 13 16 19 16.5 9.5 9.8 11.5 11.8 13.8 2.5 19 23 20 4 1 8 3 2.5 M5 0.8 14 3.2 9 15 12 11 24 18 12 10.0 10.0 9.9 1 8 1 4 1 8 1 4 3 8 1 8 1 4 6 4 20 17 24 10.7 17.2 5 24 19.5 21 26 21.5 28 25.5 27.5 30 14 8 18.5 16.2 23.3 6 17

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

EXxx-OMN0035CN

Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8

LEY-OM007

DIN * D * I/O [m] D D 1.5 3 5 1 3 5 25 16 25 16 32 32 LECP6 LECP1 LECPA DC24V DC24V LECA6 6 N * PNP NPN PNP NPN PNP NPN LECP6/LECA6 ( ) 6 P [mm] 1 * 1 N * LECP1 [mm] 1 * * LEY 32 LEY 25 LEY16 LEY16 LEY 25 LEY 32 ( ) 1 P A * * 6 12 A N 5 10 8 16 30 LECPA A P * A * ( ) ( ) 4 3 2.5 500 [m] 1 * * * * C * B * A * 8 * 20 15 10 8 1.5 1 3 5 2 2 3 5 1 2 *