Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Guide Cylinder/Compact Type Series MGC

Note 2) Bore sizes 20 and 25: M5 x 0.8 only.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

(mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

RLQ

RLQB Model C D Mounting bolt Example) Bolt M5 x 90l 2 pcs.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L d 0.030 0.060 0.030 0.060 0.040 0.076 0.040 0.076 12 16 20 25 12 16 20 25 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 4 5 5 6 8 10 13 17 9.2 11.5 15.0 19.6 IY-G012 IY-J015 IY-G02 IY-G03 NTJ-015A NT-015A NT-02 NT-03 Axial C style 5 Axial C style 5 Axial C style 8 Axial C style 10 0.7 0.7 0.9 1.15 1.5 1.5 1.5 1.55 10.2 12.2 16.2 20.2 4.8 4.8 7.6 9.6 5 5 8 10 14.6 16.6 21 25.6 Inch Threads

CV/MVGQ

Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 11 4 7 8.1 3.2 12.7 M8 x 1.0 M4 x 0.7 SNJ-016B NTJ-015A 14 4 8 9.2 4 16.2 M10 x 1.0 M5 x 0.8 NDd9 NDH10 R1 NX U1 Part no.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Compact Cylinder/Guide Rod Type Series CQM

Auto switch mounting surface Bore size (mm) 12 16, 20, 25 32, 40, 50 63, 80, 100 Port side Port side Port side Port side C A C A C A C A B B B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model Port side A, B, C sides Port, A, B, C sides A, B, C sides Port, A, B, C sides BQ-2 BQ2-012 2 kinds of auto switch

MHK2

MHK2-20S MHK2-20C 80 60 70 Gripping force (N) Gripping force (N) 50 60 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 50 40 Model Allowable moment Allowable Moment Pressure 0.6 MPa 40 0.5 MPa 30 0.5 MPa 30 (Nm) 0.4 MPa 0.4 MPa 20 20 MHK2-12S/C 0.05 0.3 MPa 0.3 MPa 0.3 MPa 10 MHK2-16S/C 0.12 10 MHK2-20S/C 0.25 0 0 20 40 60 80 20 40 60 80 MHK2-25S/C 0.49 Gripping point L (mm) Gripping point

MHK2

groove (2 positions) S O 15 3 15 10 0 0.05 5 9 4 7.5 Note) For single acting, one port is used as a breather port. 21 M5 x 0.8 (Finger opening port) 2.5 MHKL2-20: Long stroke type 18.6 2-M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through

Wedge Cam Operation Provides

MHK2-20S MHK2-20C 80 60 70 50 Holding force (N) Holding force (N) 60 Allowable moment Pressure 0.6MPa 50 40 Model Allowable moment Pressure 0.6MPa Nm 40 0.5MPa 30 0.5MPa 0.05 MHK2-12S, C 30 0.4MPa 0.4MPa 0.12 MHK2-16S, C 20 20 0.3MPa 0.25 MHK2-20S, C 0.3MPa 10 10 0.49 MHK2-25S, C 0 0 20 40 60 80 20 40 60 80 M: Allowable moment (M = WL) Holding point L(mm) Holding point L(mm) W MHK2-25S MHK2

Electric Actuators

Dimensions [mm] Model L1 L2 L3 A B C D E F G J 127.1 LEPS6m-25m 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6m-50m 156.6 169.6 13 22 45 30 52 22 52 60 107.4 18 Series LEPS Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1 Motor cable length 300

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120

MVGQ

x 0.8 R port (with plug) MK(2) RS Q G 54.4 (GZ: 55.1) [56.1] RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8 Stroke: S 2-M4 x 0.7 depth 6 11-/22-MXP16-20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth

2–4

x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x 45 x 50 M3 x 25 x 30 x 35 x 40 x 45 x 50 M5 x 25 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 6.5 8.5 7.5 6.5 9 6.5 12.5 Mounting Bolt for CDQM/With Auto Switch (Built-in magnet) Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CDQMB40-5 -10 -15 -20 -25

VQ

Latching style Latching style AC () () (+) 100V AC, 200V AC 100V AC, 200V AC Reset B C Set Yellow Yellow Blue Red A A Single solenoid (AC) Latching solenoid (AC) COM. Blue Red Blue Red SOL. C C A set A SOL. Reset Gray Gray Single style B C COM SOL. SOL.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)