ITV

0 25 50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

VQ4000

44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting D

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Note 6) At rated voltage Series SYJ7000 Cylinder Maximum Operating Speed 1000 E 900 D 800 B C SY 700 Piping length 1m Max.operating speed (mm/s) SYJ 600 Piping length 5m SX A B 500 VK 400 VZ 300 VF 200 VFR 100 VP7 20 25 32 40 40 50 63 80 100 VP4 CM2 cylinder CA1 cylinder Cylinder bore size (mm) System Figure a VQ Solenoid valve VQ4 Fitting Air cylinder VQZ VQD Silencer VZS Speed controller

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

MU

40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 20Other intermediate strokes can be manufactured upon receipt of order.

Fluoropolymer Tubing Variations

Note 6) Figures shown in tables are representative values, not guaranteed values. 502 Fluoropolymer Tubing PFA TLM/TILM Series RoHS Max. operating temperature: 260c KQ2 KQB2 KS KX 22 size variations 22 size variations KM Metric size 1/8" to 1 1/4" (9 sizes) 2 to 25 (13 sizes) KF Inch size M Length per roll 10 m, 20 m, 50 m, 100 m 10 m, 20 m, 50 m, 100 m 16 m (50 ft), 33 m (100 ft) Length

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

Compact Cylinder with Solenoid Valve/

, 30, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

AC

40 53 53 70 75 90 95 61.5 95 102.5 127.5 149.5 154.5 168 204.5 11 17 25 35 37.5 40.5 48 48 25 40 48 53 70 70 90 95 26 56.8 60.8 60.8 65.5 69.5 75.5 78 25 30 30 41 50 50 70 70 28 34 34 40 54 54 66 66 30 44 44 46 54 56 65.8 65.8 4.5 5.4 5.4 6.5 8.5 8.5 11 11 6.5 15.4 15.4 8 10.5 10.5 13 13 40 55 55 53 70 70 90 90 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or