LEJ-OM004xx

/m 3] 100,000 100,000 0/mi n(ANR) ISOclass6 50/mi n(ANR) 10,000 10,000 ISOclass5 ISOclass5 30/mi n(ANR) 1,000 1,000 ISOclass4 ISOclass4 100 100 90/mi n(ANR) 10 10 50/mi n(ANR) 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particl diameter[m] Particl diameter[m] 2.2 Amount of vacuum aspiration The amount of recommended vacuum aspiration according to the clean time class is shown

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S

. @7, @8, @9, #0, #1 @6 @7 @8 @9 #0 #1 Wear ring A Special resin 6, 10: Not available CY1S6-PS-N 6 CY1S6-PS-N Wear ring B Special resin CY1S10-PS-N 10 CY1S10-PS-N Cylinder tube gasket NBR Guide shaft gasket NBR CY1S15-PS-N CY1S20-PS-N CY1S25-PS-N CY1S32-PS-N CY1S40-PS-N 15 20 25 32 40 CY1S15-PS-N CY1S20-PS-N CY1S25-PS-N CY1S32-PS-N CY1S40-PS-N Piston seal NBR Set of left nos. @6, @7, @8,

10-cy1s-e

. @7, @8, @9, #0, #1 @6 @7 @8 @9 #0 #1 Wear ring A Special resin 6, 10: Not available CY1S6-PS-N 6 CY1S6-PS-N Wear ring B Special resin CY1S10-PS-N 10 CY1S10-PS-N Cylinder tube gasket NBR Guide shaft gasket NBR CY1S15-PS-N CY1S20-PS-N CY1S25-PS-N CY1S32-PS-N CY1S40-PS-N 15 20 25 32 40 CY1S15-PS-N CY1S20-PS-N CY1S25-PS-N CY1S32-PS-N CY1S40-PS-N Piston seal NBR Set of left nos. @6, @7, @8,

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

e-Rodless Actuator

100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

Rotary Table: High Precision Type

Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 12. Output operation of the solid state auto switch is not stable for 50 [ms] after powered ON.

Low Differential Pressure Sensor

Mount of single unit 24 or more 0 -0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) 31 0 -0.4 0 -0.4 31 Vertical stacking mount of multiple units (n pcs.) 0 -0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 7 Pressure Sensor Controller Series PSE300 Functions A Auto shift function D Peak and bottom display function When there are large fluctuations in the supply pressure, the switch may fail to operate

IDX-OM-W017

G H J K L M N P Q IDFA3E Rc3/8 226 410 473 67 125 304 33 73 31 36 154 21 330 231 15 IDFA4E Rc1/2 453 13 498 283 275 IDFA6E 455 275 Rc3/4 15 485 568 355 300 270 31 42 80 230 32 15 240 80 IDFA8E IDFA11E IDFA15E1 Rc1 300 603 578 41 54 396 87 258 43 15 270 101 380 314 16 IDFA Series 6-3 6 3 IDX-OM-W017 6 6-4 IDFA3E / 4E / 6E / 8E IDFA11E C R GFGI R C R GFGI R L N PE L N PE TB TB ILS ILS V

Compact manifold regulator ARM5 Series

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: F (For Stroke 50 to 140mm w/Lever Unit), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 1 (NPT1/4 - G1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Accessories: For Stroke 50 to 140mm w/Lever Unit, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: NPT1/4 - G1/2, ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

SI unit for PROFIBUS DP

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

IDX-OM-W031

IDFA Series 6-1 Specifications 6 1 IDX-OM-W031 Air Dryer 6 References 6-3 Dimensions IDFA22EIDFA37E IDFA55EIDFA75E Measuremm Model Port Size A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 Dimensions 6 2 IDX-OM-W031 Air Dryer

IR10-OM00007

M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -