Series AP500

Body Poppet 316L SS Diaphragm 316L SS Nozzle Code S SHP SH 316L SS secondary remelt 316L SS Seat material Hastelloy C-22 Hastelloy C-22 Code Material PCTFE (Standard) PTFE 3) Hastelloy C-22 Hastelloy C-22 No code TF H 3) PTFE recommended for applications such as within a process tool.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

2 Meter-out type Meter-in type 638 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Dimensions: Elbow Type Seal method: Gasket seal For Uni thread Indicator window direction: 0 Indicator window direction: 180 W1 X W2 Y D3 AS-F AS-F Applicable tubing O.D. d TMH ASD AS L3 A L4 D1 AS-FE KE AS-FG L2 L1 M1 AS-FP H (Width across flats) T AS-FM Metric Size [mm] Model d T H

MHF2

MHF2-16D1 MHF2-16D2 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602 MHF-A1602-1 MHF-A1602-2 Finger assembly Kit no. Description Contents MHF2-20D MHF2-20D1 MHF2-20D2 MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002 MHF-A2002-1 MHF-A2002-2 Finger assembly e, r, t, y, !4, !6, !

MHF2

MHF2-16D2 MHF2-16D1 MHF2-16D @0, @1, @2 MHF16-PS MHF16-PS MHF16-PS Seal kit e, r, t, y, !4, !6, !9 Mounting screw MHF-A1602-2 MHF-A1602-1 MHF-A1602 Finger assembly Kit no. Description Contents MHF2-20D2 MHF2-20D1 MHF2-20D MHF20-PS MHF20-PS MHF20-PS Seal kit @0, @1, @2 MHF-A2002-2 MHF-A2002-1 MHF-A2002 Finger assembly e, r, t, y, !4, !6, !

Lubrication Equipment

When the volume of oil in the case reaches a certain level, float e ascends, valve t descends via lever r, nozzle w closes, and the feeding of oil stops, thus completing the oil feeding process. When the oil in the case is consumed, float e descends, valve t ascends via lever r, allowing oil to be fed from nozzle w. G AL Selection Warning qAir should not flow from the secondary side.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

S Applicable tube O.D.

LEC-T1_C

Speed 000 Absolute 000 100mm/s 001 Relative 001 200mm/s ESC keySET key ESC keySET key AX IS. Step 1 Step 1 No. Move mode No. Speed 000 Absolute 000 100mm/s () 001 Relative 001 200mm/s b) SET AX IS. AX IS. Step 1 Step 1 No. Move mode No. Speed 000 Absolute SET 000 300mm/s SET 001 Relative 001 200mm/s 58 - (3-2) TB Ver.511 Step data Step No.

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Information

q w e r t i i o o !

Flow Control Equipment

Symbol None Sealant S Applicable tube O.D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

system Simple wiring H system Send unit: SD-120 S-LINK controller: SL-CU1 Send unit: SD-H2 16 output points 16 output points (type SJ1) 16 output points 8 output points (type SJ2) b) Crossover wiring (sensor link system) a) T type multidrop wiring (S-LINK system) DG DG 24V 0V 24V 0V Power supply{ 24V 0V D G D G 24V 0V Power supply{ 24V 0V D G D G 24V 0V 24V 0V Power supply{ 24V 0V Power

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

76

Ticaret S irketi THAILAND SMC (Thailand) Ltd. ITALY SMC Italia S.p.A. MOROCCO (Distributor) Soraflex PHILIPPINES Shoketsu SMC Corporation GREECE SMC HELLAS E.P.E TUNISIA (Distributor) Byms INDIA SMC Pneumatics(India)Pvt.Ltd. IRELAND SMC Pneumatics (Ireland) Ltd. EGYPT (Distributor) Saadani Trading & Industrial Services ISRAEL (Distributor) Baccara Geva A.C.S. Ltd.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

It is recommended for future piping expansion that all piping ends should terminate with a T joint with plugs.

Accuracy: High-precision Type, Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead (mm): 10, Stroke (mm): 890, Motor Option: None, Cable Type: Robotic Cable, Flexible Cable, Cable Length: 10m, Driver Type: LECSS2-S*/T, S: 200 to 230 Power Supply Voltage; T: 200 to 240 Power Supply Voltage, I/O Connector: 1.5m

PFxx-OMO0007CN

() 10 m DC(-)() () -7No.PF-OMO0007CN * ( ) () CE 050 -8No.PF-OMO0007CN * ON , 10 /23 3 OFF (19 ) * OUT -9No.PF-OMO0007CN (11 ) SI L/min L (11 ) 1/8 1/4 3/8 1/2 -10No.PF-OMO0007CN N (3 m) PF2A7--28--X560 NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T

CG1-SMV13_en

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

150 With auto switch CA1 Number of auto switches S n Bore size 20mm 25mm 32mm 40mm CS1 Air cylinder with auto switch 20 25 32 40 2 1 n Without auto switch (Built-in magnet) Auto switch * Refer to the left table for selecting applicable auto switches.