CU

Special function Type Electrical entry Wiring (output) Indicator light Applicable load 0.5 (Nil) 3 (L) 5 (Z) DC AC Perpendicular In-line 5V 12V IC circuit 100V or less Reed switch Solid state switch A90 No A90V Relay PLC 2-wire 24V Grommet 12V A93 100V A93V Yes 3-wire (NPN equiv.) 3-wire (NPN) 3-wire (PNP) IC circuit 5V A96 A96V F9N F9NV IC circuit 5V 12V F9P F9PV 2-wire 12V F9B F9BV

Dedicated Controller

Contact pin (preassembled) N 3 Terminal Pin no.

Brake mechanism added

4 3 2 1 699

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated water) 2 port solenoid valve 1/4 (8A) 3 3/8 (10A) CAC406 (SUS) FKM (EPDM) 1/2 (15A) 1/4 (8A) 3/8 (10A) 4 1/2 (15A) 3/4 (20A) OUT IN Viewing the graph To generate a water flow of 5l/min at a differential pressure of 0.1MPa, an effective area with Cv factor 0.35 (VCB , 3) or more is required. 3 4 100 VCB 10 Cv = 2.1 3 4 VCB 7 Cv = 1.38 3 4

MRHQ

4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42 22.5 M5 x 0.8 Finger opening port 3-R2 3 29 15 16 10 22 8 31 18 51.5 6 40 78 Angle adjustment bolt 2-5.5 through 2-9.5 depth of counter bore 3 3-R2 11 2 10 +0.03 0 3-4H9 long groove depth 4

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

ITVH

IR Power supply voltage IRV 0 24 VDC Cable connector type VEX Straight type 3 m Input signal 0 Current type 4 to 20 mA DC 1 Current type 0 to 20 mA DC 2 Voltage type 0 to 5 VDC 3 Voltage type 0 to 10 VDC 40 4 points preset input type SRH S SRP SRF Right angle type 3 m ITV Monitor output Nil None (Preset input only) 1 Analog output 1 to 5 VDC 2 Switch output/NPN output 3 Switch output/PNP

Rotary Cylinder Series MRQ Size: 32, 40 1

3 !4 !5 !6 !7 !8 !

3

Digital display allows visualization. 3-color/2-screen display, Improved visibility Remote control is possible with accumulated pulse. 1 Flow Switch Flow Rate Variations Applicable flow range [L/min] Series Minimum setting unit Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 0 3 Thermal type (MEMS) Air N2 0.5 0.5 1 1 3 3 Applicable flow range [L/min] Minimum setting

Compact Guide Cylinder

(Refer to page 3.)

3-Position Rotary Table

Each operational contents Figure 3 Pressure port and active speed controller Table 1 Operating Pressure port Speed controller A, C B, D C port B port D port A port Clockwise-1 C Clockwise-2 1 l o ec Co s k Counterclockwise-1 w wi is 2 k un ec eo 2 Counterclockwise-2 l C te is rc kw lo oc ck cl wi er se nt -1 u o C 294 3-Position Rotary Table MSZ Series Angle Adjustment 1) Stop positions

VCB

TI/ TIL 0.54 4 0.8 13 1/4 (8A) 3/8(10A) 1/2(15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCB3 3 PA 0.80 5 0.5 19 3.0 1.4 7 0.2 33 PAX 2.1 10 0.1 50 0.35 3 3.0 8.4 PB 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 0.60 4 1.3 14 0.85 5 0.7 20 VCB4 3.0 4 1.4 7 0.3 33 2.1 10 0.12 50 Note 1) Refer to model selection on page 17-2-24 regarding port size and orifice size

CYV

3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

MRQ

3 Compact hexagon nut Stainless steel Platinum silver !4 !5 !6 !7 !8 !

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

Electrical entry direction Perpendicular In-line F9N F9P F9B F9NW F9PW F9BW Load voltage Wiring (output) Special function Type Electrical entry Indicator light 0.5 (Nil) 3 (L) 5 (Z) AC DC F8N F8P F8B 3-wire (NPN) Solid state switch 3-wire (PNP) 12V 24V Grommet Yes 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Diagnostic indication (2-color indication) Lead wire length symbols: 0.5m ..

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: 1000mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: 600mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, w/o Connector, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: PVDF, M6, Option: Bracket + Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant