Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 20 25 32 40 50 63 80 100

Step Motor Controller

(N.C.) 21 Series LECP6 Series LECA6 Step Data Setting 1. Step data setting for positioning 2. Step data setting for pushing In this setting, the actuator moves toward and stops at the target position. The following diagram shows the setting items and operation. The setting items and set values for this operation are stated below.

Environment

Applied portion Order no. 21 25 LE-D-2-2 32 LE-D-2-3 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) * Apply grease on the piston rod periodically.

CP95

40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12

CP95

18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25

EXxx-OMN0035CN

15 22 24 V() 23 24 V() 24 0 V() 25 FE EX600-DXPE EX600-DXNE 102223 24 V 102223 24 V 1~814~21 1~814~21 DC24 V 4.7 k 4.7 k DC24 V 111224 0 V 111224 0 V FE 1325 FE FE -22No.EX-OMN0035CN-A (4)EX600-DXF 1 24 V() X0 2 0 0 3 1 4 0 V() X0 1 24 V() X1 2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 24 V() X4 2 8 4 3 9 4 0 V() X4 1 24 V(X5 2 10 5

HRX-OM-R016

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRX-OM-W038

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

up to 750 21 25 78 14 13 32 65.8 M22 X 1.5 204 102 52 116 18.5 80.5 M12 X 1.75 21 17 37 40 11 23 0 37 40 22 72 21 up to 750 30 21 92 14 16 41 72.8 M26 X 1.5 215 116 52 87.5 M12 X 1.75 126 20 21 17 40 40 11 23 0 37 40 26 With rod boot Non-locking CBAI40SCBA11, #1 CBAI50SCBA12, #1 CBAI63SCBA13, #1 CBAI80SCBA14, #1 CBAI100SCBA15, #1 Locking CBAIB40SCBA11, #2 CBAIB50SCBA12, #2 CBAIB63SCBA13,

Series VQ Base Mounted Metal Seal/Rubber Seal

L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

11 Hexagon width across flats 21 4 x M4 x 0.7 Width across flats 37 45 Width across flats 24 3 x M3 x 0.5 (mm) (mm) Model A 40 ZPX40H-01-B8 C M8 x 1.25 40 ZPX40H-01-B10 42 M10 x 1.5 B 42 A B C D E F Y G 63 65 14.5 26 41 63 3.5 M10 x 1.5 Model ZPX63H-01-B10 ZPX63H-01-B12 ZPX80H-01-B10 ZPX80H-01-B12 63 65 14.5 26 41 63 3.5 M12 x 1.75 50 ZPX50H-01-B8 52 M8 x 1.25 80 82 16.5 28 43 65 4.5 M10

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

21 Series MGZR Construction y !

PFxx-OMJ0005CN

2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Description Model Without With Air cushion Parts name Amount Air cushion 9 CRA130 90Z P694010-20 P694010-22 Slider 2pcs 11 Tube gasket 2pcs CRA130 180Z P694010-21 P694010-23 12 Piston seal 2pcs CRA150 P694020-20 P694020-21 19 Spring pin 4pcs Cushion seal CRA163 P694030-20 P694030-21 27 2pcs CRA180 P694040-20 P694040-21 (Grease pack) (10g) CRA1100 P694050-20 P694050-21 39 - Table (16) Angle

CEx-OMB0060

Counter operation 21 7-3-1. Handling data range 21 7-3-2. Reset and hold input 21 7-3-3. Correspondence of banks and bank terminals at switching 21 7-3-4. Correspondence of preset numbers and output terminals 21 7-3-5. Output 22 7-3-6. Preset output forms list 23 7-3-7. Output timing chart 24 7-4. Memory (E2ROM) 26 Chapter 8: RS-232C Communication Functions 8-1.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Digital Gap Checker

-2 3 ISA-21-3 4 ISA-21-4 5 ISA-21-5 6 ISA-21-6 Regulator AR20-02-1-B -12No.PS-OMT0002-E 2 About this product 2 port solenoid valve VX210X276 Bracket (when control unit fitted) (Nominal size:3 x 8, 2 screws) ISA-17 Spacer with bracket Y200T-A Modular adapter E210-U01 Spacer ISA-18 With O-ring : When a 2 port solenoid valve is connected to the right. -13No.PS-OMT0002-E 2 About this product

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

12 15 22 15.5 18 50 21.5 11 13 15 17.5 22.5 24.5 11.5 13.5 16.5 23.5 17 19.5 14.5 63 24 13.5 14.5 17.5 20 25 26 25 18.5 21 80 14 17 24 13.5 16.5 17.5 20 25 28 17 20 27 20.5 23 100 17.5 20.5 27.5 17 21 21 23.5 28.5 32.5 21.5 24.5 31.5 25 27.5 Auto switch mounting heights (mm) Auto switch types D-F5, D-J5 D-F5W, D-J59W D-F5BA, D-F5F D-F5NT D-A3 D-G39 D-K39 D-A5, D-A6 D-A59W D-B5 D-B6 D-A44

Compact Cylinder

17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to 50 23.5 19 30 25.5 7 10 33.5 5 M5 x 0.8 40 2.5 8 4.5 24 3.5 8 36 8 32 5 to 50 26 21 32.5 27.5 12 12 41 5 M6 x 1.0 51 2.5 10 5 31 4.5 9 43.5 10 40 5 to 50 31 25 37.5 31.5 13 14 47 6 M8 x 1.25 60 3.5 12 6 37 4.5 11 50.5 10 6 JCQ Series Bore Size Standard (Through-hole): JCQ, JCDQ 50 to 100 50 to 80 Both ends tapped