rep-filter-e

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

ITV

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Industrial Filters Replacement Procedure

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

Compact

q Check the actuator label for model number.

EXxx-OMW0014CN

LED EX245-LA1/LB1 LED LED . 9-15 4 (C/Q) LED No.0,2,4,6 LED Port deactivated (L+) (ON/OFF1Hz) IO-Link IO-Link (ON/OFF2Hz) IO-Link Device IO-Link (L+C/Q) OFF Digital input ON (L+) OFF Digital output ON (L+C/Q) . 9-16 2 (I/Q) LED No.1,3,5,7 (EX245-LA1A) LED status Description I/Q OFF Digital input (I/Q) I/Q ON . 9-17 2 (P24) LED No.1,3,5,7 (EX245-LB1B) LED status Description

Air Slide Table Series MXP

5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

High Vacuum Angle Valve

With heat-resistant 2-color indicator solid state auto switch Sensor How to Order Amplifier q w e r t y u XL 2 M9NJL A A 40 H4 Heater XLA w Flange size q Series e Indicator/Pilot port direction Rear flange surface Size 25 40 50 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Valve type Shaft seal type A Single acting (N.C.)

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Free Mount Cylinder Series CU

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

CXWM/CXWL

9 @0 No. q w e r t y u i o Rod cover Housing Piston Piston rod Plate Adjusting bolt Hexagon socket head set screw Snap ring Magnet Spring Type CR snap ring Round R type retainer Shock absorber Hexagon socket head set screw Hexagon socket head plug Hexagon socket head set screw Piston seal Rod seal Cylinder tube gasket Piston gasket Locking body Lock finger Lock piston Rod cover Steel ball

Slide Unit Series CX2/CXWM/CXWL

0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

CKZ2N

N O P Q 85.0 Part no.

PEEK

3 Sleeve 7 SUY Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 6 Series LVM10/100 Construction: Base Mounted LVM10R3 LVM10R4 LVM10R6 !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

Slide Unit Series CX2/CXWM/CXWL

0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB PA PB PW R Q GC JA JB 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 174 210 56.5 52 64 96.5 22 25 91.5 15.5 14.5 202 M12 45.5 55.5 46 56 54 62 7.5 M12 x 1.75 M14 x 2.0 25 31 M12 x 1.75 10.6 17.5 14.5 25.5 32.5 74 89 38 45 25 30 19 23 18 25 80 100 116 66 111.5 19 18