Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A Width across flats 10 3 34.5 15 11 6 41 18 14.5 10 51 22 20.5 N S U F GN GS J K ZP3 T 10 13 16 B B5 15 59 40.5 10 20 66.5 48 JB K Dimensions Per Vacuum Inlet: One-touch Fitting 1.82 Bellows Type with Ribs Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

ZSP1

Filter case Pin Slot Housing Filter element (ZX1-FE) Filter gasket Gasket groove Connector Socket Lead wire Hook 16-7-3 Series ZSP1 Dimensions Grommet type: ZSP10X Adjusting needle Pressure sensor Vacuum supply port ADJ 20 Adsorption nozzle port 08 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5

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Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 Series ADH4000 Construction Component Parts q o i u !1 No.

NCQ8

Leakage current from switch is 1 mA. 51 Reed Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) Refer to www.smcworld.com for details of products compatible with overseas standards. Auto Switch Specification Grommet Electrical entry: In-line PLC: Programable Logic Controller D-A90, D-A90V (Without indicator light) D-A90, D-A90V Auto switch part no.

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Rc G NPT Nil F N Port size 04 1/2 (Female thread) 14-20-51 2 Series ADH4000 Construction Component Parts q o i u !1 No.

Series HAW Water Cooled Aftercooler 1

70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38 40 41.5 39 40 42.5 200 300 400 500 1000 1500 2000 3300 4000 4000 5700 7000 HAW2 5 HAW7 5 37.5 47 51

IDG

auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV/100SV 614 14-19-51

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Dimensions MSUA1 MSUA1-S/SE C 8-M3 x 0.5 depth 5 51 31 38 23.5 B 25 4-M4 x 0.7 depth 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3-3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A

CE

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI W S CEP1 CE1 Rod side flange style: CEP1F12 Stroke CE2 ML2B 4 (Positioning pin hole) C J G5-S CV 4 +0.05 +0.02 (Positioning pin hole) +0.05 +0.02 MVGQ 27 18 CC 6 RB 5.5 38 4-4.5 J 50 D-X 20Data 10-12

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

800) 258-9200-www.stevenengineering.com B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51

JA/JAH/JB/JS

compression force (N) Applicable bore size (mm) M A Maximum thread depth P Model Center of sphere R Allowable eccentricity U Weight (kg) B C D E F G H Nominal size Pitch -X Compression Tension JB12-3-050 JB16-4-070 JB20-5-080 JB25-6-100 JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 24.5 26.5 33 38 51

RSQ

RSG-R Bore size: 40, 50 Workpiece transfer direction (51 + Stroke) M45 x 1.5 Stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A 4-9 through 63 + Stroke 67 + Stroke 130 + 2 stroke B Built-in One-touch fittings QB QA Tubing O.D.

RZQ

37 47 37.5 47.5 34.5 44.5 36 46 40 50 39 49 J D-A7H,A80H D-F7,D-F79F D-J79,J79W D-F7W D-F7BAL D-F7NTL DD-F7V D-F7WV D-F7BAVL D-A9V D-J79C D-A79W D-P5DWL D-F9BAL D-A73C D-A80C D-M9V D-F9WV D-A7,A80 Bore size (mm) -X 20U U U U U U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 Data 40 44 35 36 42 38.5 41.5 37.5 30.5 32.5 30 50 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 56.5 47.5 48.5 54.5 51

CJ1

D-X 12.5 20Data Symbol S Z Stroke Bore size (mm) 4 5 10 15 20 5 15 20 10 18 23 28 33 51 61 66 56 6-2-3 4 Air Cylinder Single Acting, Single Rod, Spring Return Series CJ1 2.5, 4 How to Order/Single Acting CJ1B S 4 10 U4 Applicable tubing Mounting style Basic style Size O.D. 4 mm 4 mm B Tubing material Symbol Bore size 2.5 mm 2.5 mm Bore size Polyurethane Soft nylon Courtesy of Steven Engineering

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Guide Table Series MGF ø40, ø63, ø100 1

Model Bolt Maximum tightening torque (Nm) l (mm) MGF40 MGF63 MGF100 7.5 10 M6 x 1 9 25 M8 x 1.25 9 51 M10 x 1.5 Mounting from bottom side Model Bolt Maximum tightening torque (Nm) l (mm) MGF40 MGF63 MGF100 7.5 18 M8 x 1.25 Example) 9 36 M10 x 1.5 9 65 M12 x 1.75 2. When mounting a workpiece to the cylinder, do so only when the piston is retracted.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43