HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double

IZN10_C

24 24 24 24VDC VDC VDC VDC Class Class Class Class2 2 2 2 UL UL UL UL Listing Listing Listing Listing ( ( ( ( ) ) ) ) D D D D ( ( ( ( ) ) ) ) ! 0~55 -8- NOx 0.1ppm a.0~55 b.35~65%RH c. d. e. f. g. h. i.() j. k. l. m. n. (IDF )(AF/AFF )(AFM/AM , -9- 4 4 4 4-2. 2. 2. 2. 4-2-1. D D 4-2-2.

AR20-B to AR60-B

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

AC Servo Motor Driver (MECHATROLINK-II type)

5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

S Couplers

-10F) 25 5 KKA4 Series (KKA4P-02F+KKA4S-02F) 20 4 15 3 10 2 KKA3 Series (KKA3P-01F+KKA3S-01F) 5 1 KKA7 Series (KKA7P-06F+KKA7S-06F) 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Plug: Without check valve Socket: With check valve Plug: Without check valve Socket: Without check valve 10 10 9 9 KKA6 Series (KKA6P-04M-1+KKA6S

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

HEC-OM-S008

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Thermo-con ACK UT CR 4.2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

(mm) 6, 8, 10 6 8, 10 4 6 6 8 10 12 10, 12 VCHC Controlled flow Free flow 230 100 260 390 460 660 790 920 1580 1710 Flow rate L/min (ANR) ASR ASQ Sonic conductance dm3/(sbar) 0.64 0.28 0.72 1.1 1.3 1.8 2.2 2.6 4.4 4.8 Flow Direction Symbols on Body Critical pressure ratio Controlled flow 0.2 0.25 0.3 0.25 0.25 Free flow 0.4 0.2 0.3 0.2 0.3 Meter-out type Meter-in type Note) Flow rate values

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

Desktop Duster Box

Ionizer Additional air blow Air blow Ionized air 497 ZVB Series Dimensions C B D A C B A D F E [ZVB20] F E [ZVB40] Model A B C D D Note 1) E F F Note 2) ZVB20 211 202 212 310 351 210 297 341 ZVB40 248 392 298 349 390 400 384 428 Note 1) Dimension D is the overall height including the knob of the regulator.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

(max. 20 stations) Valve stations Supply/Exhaust block assembly fitting specifications Note Symbol 02 Stations 2 stations Double wiring specification Straight Nil L B Supply/Exhaust block assembly mounting position 08 02 Elbow fitting (upward) 8 stations Elbow fitting (downward) 2 stations Specified wiring (up to 16 solenoids are possible) U D B M U Side (2 to 10 stations) D Side (2 to

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

3

L/min 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

AMF

190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50