KR

Note) D1: Max. diameter 15-3-3 4 Series KR Union Tee: KRT Effective area (mm 2) FR soft nylon FR double layer Applicable tubing O.D.

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

High Vacuum L Type Valve

R Heaters Valve size Temperature specifications 25 40 50 63 80 H4 (100 oC) XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 H5 (120 oC) XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2(2 sets) Example) The heaters included with XLG-80H5-2 are 2 pieces of XL1A25-60S-2 (a set including 2 heater units). 8 XL-OMV0003 4. Specifications 4-1.

Manifold Specifications

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 K plug connector 3-7-15 Series VZS2000 How to Order Manifold Assembly Manifold Specifications Porting specifications 4(A), 2(B) Port 1(P), 5(R1) 3 (R2) Port size Rc 4(A) 2(B) Stations Please indicate manifold base type, corresponding valve, and option parts.

Rotary Table/Vane Style Series MSU

MSUA1 MSUA1-S,SE C 8 x M3 x 0.5 depth 5 51 31 38 23.5 B 25 4 x M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3 x 3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A , B , C ) 27 2.5 2 2 x 4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2 x 4.5 through 2 x M3 x 0.5 1 5 Adjustment: Max. 7.5 B port

CG1-OM0227

P4 1-1. 2. P4 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P18 3-1. 3-2. 3-3. 3-4. 4. (XC85,X446) P25 4-1. 4-2. PTFE 5. P26 6.

PSE550/300

ZSM Dimensions PF2 2 x 3.5 through IF Indicator light 24.3 37 27 Data 4.8 4.4 10.7 7.3 37 25 9 3000 15 11.7 10.4 2-M3 x 0.5 depth 4 With bracket A 37 27 40.9 68 25 38.5 4.2 11.6 69.5 7 20 1.6 A View ZS-30-A bracket 16-3-35 4 Controller Series PSE300 How to Order Input/Output specifications Unit specifications 0 1 2 3 4 5 NPN2 output + 1-5 V output NPN2 output + 4-20 mA output NPN2 output

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

PF-OMN0009_C

,, 4 -18No.PF-OMN0009CN-F () M8 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Rc(NPT)3/8 2224 Nm Rc(NPT)1/2 2830 Nm Rc(NPT)3/4 2830 Nm Rc(NPT)1 3638 Nm Rc(NPT)11/4 4042 Nm Rc(NPT)11/2 4850 Nm -19No.PF-OMN0009CN-F PVC PVC PVC PVC -20No.PF-OMN0009CN-F -21No.PF-OMN0009CN-F ,FG 1 DC() 2 N.C./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k

MRHQ

2.5 MHW 3-R1.5 4.5 11.5 23 11 2 MRHQ 18 25 15.5 41.5 Misc. 5 Angle adjustment bolt 33 33 63 D3-R1.5 2011 +0.025 0 2-4.5 through 2-8 depth of counter bore 2.5 3-3H9 depth 4 (one each on three sides) 2 10 +0.025 0 3-3H9 long groove depth 3 (one each on three sides) 0 -0.062 37h9 M5 x 0.8 Port A M5 x 0.8 Port B 4-M4 x 0.7 depth 6 I N J E A D P A A M N 2 R SMC R E O P P T 6 A I R R G Y R A I

CQM

2 !3 !4 !5 !6 !

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

Clamp Cylinder

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Cushion 2-7. Directional control 2-8. Auto switch 3. Maintenance P17 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4. Basic Circuit for Clamp Cylinder Operation P23 5.

VPA4

1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4:

CG1x-OM0006N

P6 1-1. 2. P7 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P16 3-1. 3-2. 3-3. 3-4. 4. P24 5.

CYP

MM Thread depth M L T Y T PA K 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

OML0002-C

Safety Instructions 3 2. Specifications 5 3. How to Order 6 4. Mounting 4-1. Precautions for mounting 7 4-2. How to mount 9 4-3. Wiring table 15 4-4. Power supply cable wiring diagram 16 4-5. Timing chart 16 5. Functional Explanations 17 6. Outline Dimensions 18 7. Maintenance 7-1. Precautions for maintenance 19 7-2. How to maintain electrode needle 20 2 - 1.

High Vacuum L Type Valve

90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.