Stations: 8 Stations, Port Size: M5 (M5 Thread), Kit Name: P (Flat Cable 26P), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 26 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: M5 (M5 Thread), Kit Name: T (Terminal Box), Common: N (-COM), Option 1: None, Option 2: D (DIN Rail Mounting)

Stations: 6 Stations, Port Size: M5 (M5 Thread), Cable Length: 0 (0.6m Cable), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: N (Name Plate)

Adapter Material: Brass, Pad Diameter: ø4, Pad Type: UM (Flat w/Groove), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø4, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø6, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø13, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø10, Pad Type: UM (Flat w/Groove), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø10, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø16, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)], Bracket: N (w/o Bracket, Single Unit)

VEX-OMY0001

-2No.VEX-OMY0001 / 1 1.5 *3) *3)1 1 () No.VEX-OMY0001 -3- VEX3 3 / / 1 VEX3 DC () () , () ,ON OFF () C-R ( )C-R ( ) DC VEX3121, VEX3122, VEX3221, VEX3222, VEX3 2% VEX3321, VEX3322, VEX3421, VEX3422 VEX3 , VEX3501, VEX3502, VEX3701, VEX3702, 3% VEX3901, VEX3902 AC 15% (SSRTRIAC )AC 1) (C-R ) OFF 2) () 4 No.VEX-OMY0001 VEX3 / / 1) 1 2) 1V 1) M5 0 1/6 1/4

AL800/900

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

5 Port Solenoid Valve, Series VQ2000/Sub-plate Single Type

Thread type Nil RC N NPT T NPTF Enclosure F G Dustproof Nil IP65 (dusttight/splash proof) W Note) Note) Valve specifications are IP65.

.: M5 (M5 X0.8), Thread Material/Surface Treatment: N (Brass + Electroless Nickel Plated), Sealant: None, Release Button: 1 (Oval Type)

Large Flow Lubricator AL800/900 Series

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 1046

3

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: w/o Mounting Option, w/o Pressure Gauge, Semi-Standard: 1 + N + R

Body Size: 10, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: M5, Option: Assembly of a Bracket & Set Nuts, Semi-Standard: 1 + N + Z