3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

EXxx-OMN0027CN

0.70.8 Nm (EX600-ZMA2) (EX600-ZMB2) (3)DIN DIN (4)DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm DIN DIN (EX600-ZMA2) 6 -14No.EX-OMN0027CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180 (1) (2) (3) A B C (EX600-ZT1) -15No.EX-OMN0027CN-D SI EX600-S A SI 1 PNP(-COM) 2 NPN(+COM) PR PROFIBUS DP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 11 (BUS IN) 12 (2

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

with switches only) Brown Black Blue Brown Brown Load Black Blue Relay Black Blue Load Switch 1 Load Switch 1 Switch 1 Relay contact Brown Black Blue Brown Black Blue Brown Black Blue Switch 2 Switch 2 Relay Switch 2 The indicator lights will light up when both switches are turned ON. 2-wire 2-wire with 2-switch AND connection 2-wire with 2-switch OR connection When two switches are connected

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D M9N S A PC MHS Connector model M83 pin M84 pin M124 pin MHC 1 2 1 4 Pin arrangement 1 2 MHT Solid state switch Standard part no. 3 4 4 3 3 MHY For the applicable auto switch model, refer to the table below.

80

size of 4 (size 1 or 2) is used.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) VQZ100 VQZ100-S-01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 40.5 M Bottom view of MXQ25-75 13228 15 31 K 8 15 31 KA 22 50 65 0.5 52.5 8 55 Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23

SYJA3000

SYJA3l20-M3-F JIS symbol 5 port 4 port The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached. 2 position single 2 position single Fluid Specifications (B) 2 (B) 2 (A) 4 (A) 4 Air 0.15 to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Operating pressure range (MPa) 2 position double 2 position double 2 position double 3 position

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

CG1x-OM0006N

P101. 2 CG5 N A (mm) E max (J) E max (J) 2 E=(m/2)v 20 0.28 0.42 25 0.41 0.65 E J m: (Kg) v m/s 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max (J) 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 (2) 2-7. 14 28. 3 13 2 3CDG5 (M4 1~1.2Nm 3 3.

Digital Gap Checker

light (With surge voltage suppressor) Z2B *2 100 VAC Z2C *2 110 VAC *2: Made to Order.

Thermo-con/Rack Mount Type

1500 W*2 Alarm Refer to Alarm.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(A) 2 N.O. N.C. N.O.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

VP3145/3165/3185

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(A) 2 N.O. N.C. N.O.

Air cylinder

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P18 3-1. Replacement of rod seal 3-2. Checks 3-3. Consumable parts 4. Made to order product (XC85, X446) P21 4-1. Food Machinery Grease Specification 4-2.

IP80-OM00019

O 21 5. ( 3-1-2 ) 6. () ( 7-2) 22 11 11-1 OUT1OUT2 (1920) 6 90cm3 07 P36801080 P565010-18 180cm3 1 P36801081 P565010-19 O P5 19 20 (1) O (2) A (P22401123) 11-2 IP8100 IP8100 7 M P368010-24 S P368010-25 21 M 22 S M IP610 SIP610 23 11-3 IP8000 IP8000 8 1085mm P368010-20 35100mm P368010-21 50140mm P368010-22 11-4 (IP8*00-**0)2 9 (A) P368010-26 79 (B) P368010-27 911 G1/2 23 24