VEA

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Feedback circuit (VEA252 only) P/I/D adjustment NULL adjustment Warning Integrator cicuit Driving circuit Voltage comparing circuit Electro-pneumatic proportional valve GAIN adjustment 1.

SMC Electronic Switch Series Variations

21 ZSP 27 27 Mounting thread M2.5 X 24 Mounting thread M2.5 X 24 ISl Grommet style SE1-14, -15, -18, -19 Connector style SE1-14C, -15C, -18C, -19C ZSM I Z 01 T1 01 T1 I Z PFl Pressure setting trimmer Pressure setting trimmer Pressure setting trimmer Pressure setting trimmer IFl HYS HYS SET SET 15 15 Indicator light Indicator light 23 23 I Z I Z SE1-01 -16, -17 SE1-01 -16C, -17C Pressure

VM

Straight Plunger/VM220-02-05, VM230-02-05 Panel mounted hole JIS Symbol 2 port 3 port 56N F.O.F. 0.5MPa supply 3.5mm P.T. 2mm O.T. 5.5mm T.T. 3.5-21 VM200 Series VM200 Roller Plunger/VM220-02-06, VM230-02-06 VM220-02-06S, VM230-02-06S JIS Symbol 2 port Panel mounted hole 3 port SlA VlA 56N F.O.F. 0.5MPa supply 3.5mm P.T. SlA 2mm O.T. 5.5mm T.T.

VQ

L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)

Compact

See pages 31-39 for more information on SMC'S LC6 series drivers, Seiles uff EleGriGlcMflors 0inrmh$l$till$swm LXFH5B (30Omm) ft hlor-T;+ -r-I "kl T slot dimensions (21 ) J I shows the location ai which origjn poinl swirch opetales.

Part Number Description: FITTING   Product Line: V   Product Line Description: VALVE   Family Code: 341   Family Description: VV5Q* MANIFOLD VQ 4/5 PORT   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number VV5Q* MANIFOLD VQ 4/5 PORT. FITTING. VALVE. VV5Q* NO SIZE RATING. 0.1628 lb. 21.

Part Number Description: FILTER ELEMENT   Product Line: O   Product Line Description: OTHERS   Family Code: 913   Family Description: FG HYDRAULIC FILTER   Class Code: 21   Part Code: 2   Reference Code:  K   Click here to report information errorImage shown may not match exact part number FG HYDRAULIC FILTER. FILTER ELEMENT. OTHERS. FG NO SIZE RATING. .24369 lb. 21.

AF MASS PRO NO SIZE RATING. 0.10367 lb. 21.

Piping: Body Ported, Stations: 3 Stations, A, B Port: -

Piping: Body Ported, Stations: 2 Stations, A, B Port: -

Piping: Body Ported, Stations: 8 Stations, A, B Port: -

Piping: Body Ported, Stations: 12 Stations, A, B Port: -

Passage: Top Ported Common EXH, Stations: 5 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 7 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 10 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 12 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 15 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 6 Stations Top Ported/Valve, Port Size: -, Thread: -

Passage: Top Ported Common EXH, Stations: 8 Stations Top Ported/Valve, Port Size: -, Thread: -