5

Bore size (mm) B TA TL TU TC TX TE TO TR TT TS TH TF Z** TDH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15 130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120

Table of Contents

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Allowable voltage fluctuation (%) Power consumption (W) [Current mA] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Refer to pages 3-3-60 to 3-3-65 for manifold use.

CJ2

B FB GA NA WA WW S Z Bore 10 16 15 14.5 7.5 21 14.5 4.5 66 122 18 19 7.5 21 14.5 5.5 67 123 1.3-19 Standard: Single Acting Spring Return/Extend Series CJ2 6, 10, 16 How to Order Bore size Spring extend 6mm 10mm 16mm 6 10 16 6 10 16 Standard stroke 15, 30, 45, 60 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Mounting Spring return Basic Axial foot Front flange Double clevis (Except for

VFS

to 60C (1) Non-lube (2) Non-locking push type (Flush) 150/50 m/s2 (3) Type E: Dustproof (level 0), Type F: Dripproof (level 2), Type D: Splashproof (level 4) (4) 100, 200 VAC, 50/60 Hz; 24 VDC 15 to +10% of rated voltage Class B or equivalent (130C) (5) Plug-in type Inrush Holding 5.6 VA/50 Hz, 5.0 VA/60 Hz 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz 1.8 W (2.04 W: With light/surge voltage

Electric Actuators

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

MHZ

Model MHK MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 6.1 17 40 66 104 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6

MHZ

130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6 10 14 6.1 17 40 66 104 MHZJ2-6D MHZJ2-10D MHZJ2-16D MHZJ2-20D MHZJ2-25D MHZJ2-6S MHZJ2-10S MHZJ2-16S MHZJ2-20S MHZJ2-25S MHZJ2-6C MHZJ2-10C MHZJ2-16C MHZJ2-20C MHZJ2-25C Double acting MHY MHW Single acting type, Normally open Normally closed

VFR

only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Refrigerated Air Dryers

-10, IDF15E1-10 IDU6E-10, IDU11E-10, IDU15E1-10 1 kVA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) Singlephase Refrigerant R407C (HFC) IDU E 2000 IDF22E-20, IDF37E-20 2 kVA 3 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 4 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 9 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 200 VAC (50 Hz) 200, 220 VAC (60 Hz) Singlephase 10 380, 400, 415 VAC (50 Hz) 380 to

Modular F.R.L. Unit

(6 x 4 nylon tube) Product name plate, Pressure gauge display units: PSI, F Applicable models AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 10 20 30 40 50 60 M5 1/8 3/8 1/2 3/4 1 Thread type AL20 Port size Metric thread (M5) Rc NPT G Symbol Nil Nil M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Note) N F Accessory

2/3 Port Valve

OAlowable voltage fluctuation is 10% of the rated voltage. Power consumption W (Holding) Freq. Hz 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 60 40 60 AC DC AC DC 60 60 40 60 60 Apparent power VA Model Power Max. Inrush Holding Note 1) Differ from the operating condition of pressure. Note 2) Value on option "V", "R", "Y" (Nonleak, Vacuum). (1) 10 (1) 5 AC 20 10 Min.

Table of Contents

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 2kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s

TABLE OF CONTENTS

Low Temp Range -40 to -65 F. +10 to -10 F. -40 to -65 F. -40 to -60 F. High Temp. Cont. +230 to +240 F. +325 to + 350 F. +230 to +240 F. +250 to +300 F. Duty High Temp. Int. +25 to +300 F. +425 to +450 F. +260 to +280 F. +350 to +400 F.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

For complex arrangements, specify them on the manifold specification sheet. 104 Body Ported 10-SY3000/5000/7000 Type 60 Manifold Specifications Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations A, B port location 10-SS5Y5-60(-Q) 10-SY560 10-SS5Y3-60(-Q) 10-SY360 10-SS5Y7-60(-Q) 10-SY760 Stacking type/DIN rail mounted Common SUP/Common EXH 2 to 20 stations Note 1) Valve P

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.