Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

VCA

size (mm) 4 5 7 10 Symbol 4 5 7 10 Class 3 Class 4 Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Manual override None Slotted locking type (tool required) Nil B Consult SMC regarding other voltages.

RSH

20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-

A

M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 43 (Base Mounted, 5 Port/Common Exhaust), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M5 (w/M5 Port Sub-plate)

Actuation: 3 (3 Position Closed Center), Piping/EXH: 43 (Base Mounted, 5 Port/Common Exhaust), Coil Specification: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M5 (w/M5 Port Sub-plate)

Body: Body Ported, Single Unit, Valve Option: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Body Ported, Single Unit, Valve Option: Vacuum, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Base Mounted, Valve Option: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Base Mounted, Valve Option: For Large Flow, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Base Mounted, Valve Option: For Large Flow, Vacuum, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Body Ported, Single Unit, Valve Option: For Large Flow, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Body Ported, Valve Option: Standard, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: Base Mounted, Valve Option: Vacuum, Voltage: 24 VDC, Electrical Entry: M Plug Connector, w/Lead Wire

Body: 2 (Body Ported, Single Unit), Valve Option: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire)

Body: 2 (Body Ported, Single Unit), Valve Option: V (Vacuum), Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire)

Body: 5 (Base Mounted), Valve Option: Standard, Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire)

Body: 5 (Base Mounted), Valve Option: U (For Large Flow), Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire)

Body: 5 (Base Mounted), Valve Option: W (For Large Flow, Vacuum), Voltage: 5 (24 VDC), Electrical Entry: M (M Plug Connector, w/Lead Wire)