ZP

(mm) Pad type Material Series ZPT Without buffer ZPT U N 02 A5 Vacuum entry/Mounting thread diameter Pad diameter (mm) 2 to 8 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) Connection ZX Symbol 2004 2 x 4 Thread diameter 10 to 16 20 to 32 40, 50 3507 3.5 x 7 ZR 4010 4 x 10 02 04 2 A5 A6 A8 M4 x 0.7 B4 M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 Rc B01 M5 x 0.8 M6 x 1 M8 x 1 Male thread Female

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Lubricant: Vaseline X12 Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 AK Ex.) AS1201FM-M5-23-X12 Ex.)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

0.

wire length) + 49.8 45 34.4 PE port 22 X 12 16 9 9 1/8, 1/4 [1(P), 3(R) port] 18 (17) M5 x 0.8 (External pilot port) 10 (10.5) ( ): VQZ215-lGl1-01 01 02 DIN terminal (Y): VQZ2l5l-lYll101 02 L-type plug connector (L): VQZ2l5l-lLl1Approx. 300 79 [81.2] (Lead wire length) 49.8[56.8] Max. 10 85.4 Pg7 Applicable cable O.D. 3.5 to 7 45.5 Unless otherwise indicated, dimensions

Series VV100 /D-sub Connector 3 Port Solenoid Valve Plug-in Connector Type Manifold

3 Port Solenoid Valve Series VV100/D-sub Connector Plug-in Connector Type Manifold How to Order Manifold U 1 VV100 10F C6 05 D A 2 D-sub connector type Mounting option Symbol A B Number of poles Symbol Mounting Connector block mounting position: D side 15 26 Manifold direct mounting type Nil Connector entry direction Upward Valve stations A: D-sub connector 15 pins With mounting nut M3 x

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

0.55

T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

One-touch Fittings

[mm] Weight [g] With a rib Nylon Urethane M5 x 0.8 KQ2LF04-M5 8 8.2 7 15.4 15.3 13.3 3.5 3.5 2.5 4.7 V M6 x 1.0 KQ2LF04-M6 8 8.2 7 15.4 16.1 13.3 3.5 3.5 2.5 4.6 V 1/8 KQ2LF04-01 14 8.2 10 14.8 22.4 13.3 4.2 4.2 3 17.6 V 1/4 KQ2LF04-02 17 8.2 10 14.8 26.9 13.3 4.2 4.2 3 29.6 V 4 Applicable tubing L1 M M5 x 0.8 KQ2LF06-M5 8 10.4 7 14.5 17 13.3 3.5 3.5 2.5 4.8 V M6 x 1.0 KQ2LF06-M6 8 10.4 7

0.4

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

Valve Single Unit

(Mounting hole) M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 5-Rc 3/8, 1/4 02 03 02 03 L plug connector (L): SX7140(R)-LM plug connector (M): SX7140(R)-MManual override (Press and turn for the locking type.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

M5 x 0.8 VQ 1 8 ( ): Rc VQ4 Grommet terminal: VFS2610-E-01 02 DIN terminal: VFS2610-D Y-01 02 VQ5 Lead wire O.D.

G15/G27

Model (Standard) Model (Made to Order) Pressure range (1) Indication unit Connection thread Note MPa G46-2-01/02 G46-4-01/02 G46-7-01/02 G46-10-01/02 G46-2-01 to 02M G46-4-01 to 02M G46-7-01 to 02M G46-10-01 to 02M GA46-10-01 to 02 Model Pressure range (1) Indication unit Connection thread Model Note MPa G46-2-01 to 02-C/C1 G46-4-01 to 02-C/C1 G46-7-01 to 02-C/C1 G46-10-01 to 02-C/C1 G46-

Compact 5-Port Solenoid Valve

Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 10 10 stations 02 2 stations Specified layout*2 (Up to 20 solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used

KJ

(mm) M5> M5> Weight (g) Model A M L Nylon Urethane 0.9 KJH23-M3 KJH23-M5 KJH23-01S KJH04-M3 KJH04-M5 KJH04-01S KJH06-M5 KJH06-01S M3 x 0.5 M5 x 0.8 R M3 x 0.5 M5 x 0.8 16.3 16.7 13.7 13.6 12.7 0.9 1.6 2 4.7 1.9 2.4 4.6 3.3 5.2 7 3.2 3 2.5 9.8 1 8 13.8 16.3 17 13.7 13.9 14.8 17.8 19.4 10 0.9 0.9 8 12.7 4 4 4 10.8 R 1 8 10 M5 x 0.8 14.7 4 10 4 10 13.5 10 6 15.4 R 1 8 Applicable