TABLE OF CONTENTS

B A A B . . LEAD EGRESS .11 (2.8) DIA. WIRE LEAD EGRESS .11 (2.8) DIA. WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

CLQ

Flange Style CLS A + Stroke L FT B + Stroke G 4-FD FZ FX Without auto switch With auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M CLQ A A B B 92 36 10 to 50 63 9 9 80 92 108 38 18 43.5 60 46 102 102 46 75, 100 MLGP 106.5 43.5 10 to 50 80 11 11 99 116 134 43 20 53.5 77 53.5 116.5 116.5 53.5 75, 100 RLQ 125 53 10 to 50 100 11 11 117 136 154 50 22 53.5 94 63 135 L1 Rod end nut

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

CRBB-OM00004

Assembly / Disassembly procedure 4.1 With vertical auto switch unit 19 Cross recessed round head screw 2 For D-M9 18 Switch holder 2 For D-M9 Size: 10, 15 17 Cross recessed round head screw 2 3pcs. for size 15 16 Cross recessed round head screw 2 15 Cross recessed round head screw 2 14 Holding block (B) 2 13 Switch block (B) 1 12 Switch block (A) 1 3pcs. for size 15 11 Cross recessed round

HRX-OM-X071

9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Table of Contents

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Applicable connector: Flat ribbon cable connector (20P) (Conforming to MIL-C-83503) VQZ D side n Stations 8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9 4.5 M12 x 1.75 10.5 18 10.5 18 M14 x 1.5 19 8.5 19.5 6 Rc 1/8 46 152 14.5 15 75 66 26.5 5H9 5.5 M8 x 1.25 12 55 33 5H9 5.5 11-9-27 28 Series MSQ Proper Auto Switch Mounting Position at Rotation End Size: 1 to 7 B B A A When D-F8 is used When D-F9 and M9 are used Solid state switch D-F8 Rotation D-F9W

SYJ300/500/700

M3 x 0.5 (P, R port) 15 (Bracket) 11 10 P R 22.1 6.7 1.2 (PE port) 7 9.2 L plug connector (L): SYJ32-L-M3 M plug connector (M): SYJ32-M-M3 M8 connector (WO): SYJ32-WO-M3 58.5 [60.7] (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) (2) 48.7 [50.9] 57.6 (2) 50.2 43.7 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to page 4-4-61 for dimensions

15

Magnetically Coupled Rodless Cylinder CY1S Series 6, 10, 15, 20, 25, 32, 40 RoHS Weight Overall length 15 % reduced 15 mm shortened Max. Max. (CY1S 15-100 stroke) 0.96 kg (Current model 1.13 kg) (CY1S 40-100 stroke) 240 mm (Current model 255 mm) Reduced in length Reduced in length CY3B CY3R CY1S CY1S Adjustment bolt improves stroke accuracy/repeatability.

Rotary Actuator

[mm] Size D (g6) G M N UU L 50 15 11 20 15 118 14 63 17 13 22 17 139 16 80 20 15 25 20 167 19 100 25 19 30 25 202 24 Drawing shows the appearance for rotation of 90 and 100. Dimensions show pressurization to B port. Drawing shows the auto switch mounted on the port side. * ( ) are the dimensions for rotation of 180 and 190.

VZ100/300/500

Refer to page 4-18-4.) 15 or less Applicable for vacuum use 100 kPa Max. operating frequency (Hz) 15 Flow Characteristics Refer to the table below. Non-locking push type Manual override Lubrication Mounting orientation Shock/Vibration resistance (m/s2) (2) Not required Unrestricted 300/50 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

HRX-OM-Q026

10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-10: Cooling Capacity (HRSH250-A-20/40-) 8.4 Cooling Capacity HRSH Series 8-14 HRX-OM-Q026 Chapter 8 Documents 8.4.5 HRSH300-A-20/4035 Ambient temperature: 32 oC 30 25 Ambient temperature: 43 oC Cooling capacity [kW] Ambient temperature: 45 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-11:

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

RQ

Hs A Auto Switch Mounting Height Proper Auto Switch Mounting Positions D-M9 D-M9V D-F9W D-F9WV D-A9V D-M9V D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 24.5 22 20 25 9.5 3 13.5 7 12.5 6 24.5 26.5 24 25 32 11 5.5 15 9.5 14 8.5 27 29 26.5 32 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 40 50 17 7 21 11 20 10 36.5 38.5 36 50 63 17 12.5 21 16.5 20

JXCx-OMT0001CN

(14.2) (b) (8) 2 1 (a) (14) (18) B1 A1 (17.7) 6 5 (c) 2 1 A6 B6 15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C