CXS

counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94

CXS

25 0.1 0.1 2020 20 0 0.04 0 0.04 Data 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (11) V = Up to 1000 mm/s; Up to 75 st Graph (10) V = Up to 1000 mm/s; Up to 50 st 2 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100

MG

51 43 34 26 17 85 IN 201 181 161 141 121 101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

Floating Joint

11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11 11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, only DC voltage is available.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) 10-SV1000 SX3000-57-4 10-SV2000 SY5000-11-15 10-SV3000 SY7000-11-11 10-SV4000 SY9000-11-2 264 Single Unit/Sub-plate Type [IP67 Compliant] Series 10-SV1000/2000/3000/4000 How to Order 10 W1 00 1 1 5 SV U D Clean series Series Thread type 1 2 3 4 10-SV1000 10-SV2000 10-SV3000 10-SV4000 Nil F N T Rc G NPT NPTF Actuation type Port size 2 position single 10-SV1000/2000/3000/4000 Applicable series

Basic Type/Direct Mount Type

M 4 5 5 6 7 8 10 10 TC 14 17 20 22.5 28 33 42 48 Y 39.5 54.5 64 72 79 93 113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

[I/O cable] LEC CK4 Cable length (L) [m] 1 1.5 3 3 5 5 Controller side PLC side (16) (7.9) (10) (11) (30) (60) (L) Conductor size: AWG26 Weight Terminal no.

OMU0023

value Checksum(LRC) 9 Calculated value 10 End code CR 11 LF 32 - 5.5 Memory Map The memory map for the Card Motor controller is summarized in the tables below.

LEY-OM007

/LEY 2.1. (1)(DC24V) LEY 16 LEY 25 LEY 32 [mm] 1) 30,50,100,150,200,250,300 30,50,100,150,200,250,300 350,400 30,50,100,150,200,250,300 350,400,450,500 (3000[mm/s 2]) 4 11 20 12 30 30 20 40 40 (2000[mm/s 2]) 6 17 30 18 50 50 30 60 60 [kg] 2) (3000[mm/s 2]) 2 4 8 8 16 30 11 22 43 [N] 3) 4) 5) 1438 2774 51141 63122 126238 232452 80189 156370 296707 [mm/s] 5) 15500 8250 4125 18500 9250

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73 53 20 50 28 17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27

Rubber seal 5 Port Solenoid Valve Series SYJ5000

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

Thermo-con/Rack Mount Type

(Pages 10 and 11) Tank capacity Approx. 1.3 L Port size Rc1/4 Rc3/8 Fluid contact material Stainless steel, EPDM, NBR, Ceramics, PPE, Carbon, PP, PE, PPS (High pressure) Stainless steel, EPDM, NBR, Ceramics, PPE, PPS, Carbon, PP, PE, Nylon, POM (HECR008, 010), PVC (High pressure) Power supply Single-phase 100 to 240 VAC 10%, 50/60 Hz Single-phase 200 to 240 VAC 10%, 50/60 Hz Electrical system

HRX-OM-X037

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen 11. Temperature waveform 11.

Environment

30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note 4) Note 5) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 Speed [mm/s] Note 5) 18 to 400 9 to 200 5 to 100 24 to 400