Integrated Controller

200 250 300 350 400 450 7 3000 mm/s2 3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 4 10 mm/s2 5000 mm/s2 3 2 1 0 0 0 Speed: V [mm/s] 50 100 200 150 250 300 350 400 450 Speed: V [mm/s] EQFS16HC/Ball Screw Drive Horizontal/Lead 2.5 Vertical/Lead 2.5 20 18 16 14 12 10 8 6 4 2 0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2 3000 mm/s2 Work load: W [kg] Work load: W [kg]

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

-X 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

Air Cylinder NCA1 Series

7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16

Pin Clamp Cylinders

15.0 Diamond type 11 11 15 15 538 Pin Clamp Cylinder Plate Cylinder Type Magnetic Field Resistant Auto Switch/Small Auto Switch Mounting C(L)KU32 Series Dimensions CKU32 (Clamping height LOW type) * Refer to How to Order for positional relationship of the mounting surface and port. * The figures below indicate the CKU32-lRAL-X2321. 14.50.1 14.50.1 (29) 27 70 D d Q Q 0 0.05 120 K C SR 87.5

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Nozzle Type Ionizer

Refer to page 11.) Ionizer model IZN10E--X367 (NPN specification) IZN10E-P-X367 (PNP specification) Offset voltage1 Energy saving static neutralization nozzle Within 10 V High flow rate nozzle Within 30 V 1 Measurement values based on a charged plate (dimensions: 150 mm x 150 mm, capacitance: 20 pF) defined by ANSI standard (ANSI/ESD STM3.12006).

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn X-axis Xn Z-axis Zn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

NCQ8

Description Material No. 1 8 Cylinder tube Stud Electroless nickel plated Hard anodized Aluminum alloy Steel alloy 2 Piston Stainless steel 056 to 106 Chromated Aluminum alloy 9 Piston rod B Carbon steel Stainless steel 150 to 250 Hard chrome plated 056 to 106 3 Piston rod A 10 Piston gasket Carbon steel 150 to 250 Hard chrome plated 150 and more only NBR 4 11 Collar Piston seal Anodized

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 8 5 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 11 6 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 14 7.5 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 MB MB1 CA2 Rod Clevis GKM (ISO 8140)

CP95

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

External pilot port 11 11 67 VQZ L plug connector (L) DIN connector (Y) VQD 148 (3 Position)<150> 135 (Double)<137> 300 155.5 (3 Position) MAX.10 (Lead wire length) VZS 142.5 (Double) 97.5 (Single)<98.5> Indicator light Pg.7 101.5 (Single) 65.5<66.5> VFS 69.5 Applicable cord O.D. 3.5 to 7 Indicator light VS 64<67.5> Cover diameter 1.5 R1 R2 5 3 1 P VS7 Cross section 0.23mm2 93.5 86 < >

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Wn Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 65 mm 0 mm 5 mm 0.88 kg 210 65 150 111 Z Wb 150 mm 0 mm 42.5 mm 4.35 kg Wc 150 mm 111 mm 42.5 mm 0.795 kg Wd 150 mm 210 mm 42.5 mm 0.5 kg Y 42.5 5 n = a, b, c, d 3.

LEH_C

42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 1020 150 LEHZ10,16:30(F.S.),LEHZ20,25:25(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N LEHZ 10 K 4 2 1 R 1 2 10 10 D DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

2 position single: VSA4140 2 position double: VSA4240 3 position closed center: VSA4340 3 position exhaust center: VSA4440 4-9 (11) Mounting hole 4-9 (11) Mounting hole 4-9 (11) Mounting hole ( ): Valve for Rc 3/4 5-3-36 7 Series VSA40 Manifold Specifications Specifications Valve manifold with the same body size Valve manifold with the same body size Value manifold with the different body

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

LJ1H

Applicable strokes:150, 250, 350, 450, 550, 650, 750, 850, 950, 1050 Example) LJ1S2021SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Mounting orientation Load movement direction Model Pitching Rolling Yawing 5.5 6.0 8.5 a = 500 LJ1S20 150 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a a = 1000 L1 (mm) L2 (mm) L3 (mm) 100 a = 2000 Pitching Rolling